Used VARIAN 350D #9027984 for sale

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VARIAN 350D
Sold
ID: 9027984
Wafer Size: 3"-4"
Ion implanter, 3"-4" Research cube end station.
VARIAN 350D is an ion implanter and monitor manufactured by VARIAN Semiconductor Equipment Associates, Inc. This equipment was specifically designed for ion implantation in the research and development of semiconductor materials. It is a high-voltage, high-power instrument that is suitable for high-end implantation applications including the development of new semiconductor technology. VARIAN 350 D is composed of a main system controller, an implant chamber, an implant source, a beam line, a power supply, and a primary target. The main unit controller is the center console that controls the operation of the instrument. This includes monitoring the process parameters such as beam current, beam voltage, beam line geometry, beam shape, and dose. The implant chamber is a cleanroom environment protected by a Faraday cage which allows for optimal ion implantation. The implant source is responsible for providing the accelerated ions to the main machine controller to be implanted into the target material. The beam line is composed of several eyepieces and monitors that optimize the ion beam and allow it to be directed to the desired target. Additionally, the power supply provides the necessary power to operate the instrument. Finally, the primary target is where the ions are implanted into the target material. 350D provides superior performance, accuracy, reliability, and flexibility. It features a speed range of 0.3-2.5m/sec and can implant materials such as silicon, silicon germanium, gallium arsenide, and others. Additionally, the tool can be configured with up to four implant sources, for either implantation or diffusion processes. Furthermore, this instrument is well-suited for a variety of applications including wafer inquiry, opto-electronic devices, memory devices, flip chip technology, and microprocessors. High-level precision and accuracy is also a major benefit of 350 D. It utilizes an advanced scan-controlled asset for the delivery of ions which ensures maximum performance and accuracy. Additionally, the built-in high voltage monitor prevents any sudden high voltage conditions from occurring, thus increasing safety and protecting personnel and the instrument. Overall, VARIAN 350D is an ideal choice for research and development projects involving semiconductors. Its impressive features, excellent performance and accuracy make it the ideal choice for developing superior semiconductor technology.
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