Used CANON MPA 500 Fab #9193702 for sale

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CANON MPA 500 Fab
Sold
Manufacturer
CANON
Model
MPA 500 Fab
ID: 9193702
Wafer Size: 5"
Mask aligners, 5".
CANON MPA 500 Fab is a fully automated, high throughput wafer-level mask aligner designed to provide optimal production of devices in a variety of wafer sizes and applications. The equipment utilizes CANON proprietary MPA Fab technology, which enables lithography and alignment of extremely small feature sizes with high precision. CANON MPA 500FAB features a high-throughput production process that offers high align speed accuracy and throughput with unmatched precision. Its advanced Flying Laser Alignment system (FLA) provides fast, precise alignment of laser highlighted wafer features with standard masking data, and the IR laser imaging technology accurately captures both the alignment target and the mask data in high resolution. The unit is characterized by a sophisticated imaging machine which detects the alignment target from within the mask and compensates for any non-uniformity in the field of view. The tool can also be configured with a multi-scan option for fast single shot exposures. The asset further features ultrashort pulse duration laser diode exposure systems which provide precise control of featural details. Its adjustable wavefront propagation ensures exact control and uniformity of laser exposure. MPA-500FAB also offers a dedicated resist coating model that ensures electrical imaging conditions for a variety of materials such as polysilicon, ITO, and organic polymers. Overall, MPA 500-FAB is an ultra-fast mask aligner designed to deliver precise and high precision lithography processes. Its unique feature set allows it to efficiently and accurately produce devices in a wide variety of wafer sizes and applications. The equipment can be easily integrated into existing production lines for increased productivity and cost savings.
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