Used CANON PLA 501 FA #9144944 for sale

CANON PLA 501 FA
Manufacturer
CANON
Model
PLA 501 FA
ID: 9144944
Wafer Size: 4",5"
Aligners, 4"and 5".
CANON PLA 501 FA is an automated mask aligner specifically designed for acquiring high-quality, high-precision exposure of photomasks in photolithography applications. It is capable of providing high-accuracy masks with minimum distortion and webbing. This aligner helps in providing increased process throughput, improved photomask accuracy, and precise positioning of photo-labeled structures and patterns on the photomask. The aligner is equipped with a 5 MP imager with a 16"x 12" FOV, allowing up to 0.000004" positioning and alignment accuracy. An enhanced smart stage enables mask registration to accuracy as low as 0.000063" and speeds up the process. A variety of aligners can be used in combination with this aligner, including wafer steppers, steppers and scanners, and direct write systems. CANON PLA-501FA is designed to reduce process time and improve photomask accuracy with its high precision exposure. It also provides an integrated high-accuracy autofocus optical system to eliminate distortion and webbing while maintaining accuracy to the desired specification. An intuitive user interface, coupled with an easy-to-operate-dashboard, simplifies the operation, which helps in achieving efficient and compliant processes. The aligner provides multiple recipes and feature comparison ensuring optimal settings for each application. PLA 501FA is designed to meet stringent process requirements and provides a high-performance solution for meeting these requirements. The aligner is an ideal choice for high-volume photolithography and precision applications. With its many features, the aligner ensures excellent precision, reliability, and performance.
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