Used ADE / KLA / TENCOR CR-83 #9115144 for sale

ADE / KLA / TENCOR CR-83 is a high-precision mask and wafer inspection equipment designed for modern semiconductor fabrication. It is a modular and scalable system offering exceptional flexibility and scalability, combining high-end optics, high-speed imaging, and advanced metrology to provide best-in-class defect detection. ADE CR-83 is designed to inspect a wide range of complex substrates including photomask, reticles, and wafers, including arbitrary patterns and design layouts. The unit is also capable of inspecting exposed silicon wafers for small particle defects, such as particles, voids, peripheral bruises, and hillocks. KLA CR-83 consists of an optical configuration, a 2- dimensional detector array, and various sampling stages. The optics are designed to accommodate a full range of illumination wavelength ranges, from the visible to the ultra-violet spectrum. Additionally, the working distance can be adjusted to maximize the magnification of the pattern to be inspected. The detector array is comprised of two high-resolution solid state video cameras and a laser interferometer. This detector array is designed for fast, accurate and 3-dimensional measurements. The machine also contains a sample rotation stage, which allows samples to be examined at various angles. In addition, the sample table can be adjusted to different heights, accommodating different types of substrates. The tool can also be integrated with auto-focusing and auto-alignment systems, for precise control and automatic inspection. Additionally, TENCOR CR-83 offers a unique set of image processing tools to locate and prioritize defects for rapid analysis. These tools are based on a mix of pattern recognition algorithms, optical processing, thresholding, and image comparison. This provides the user with the ability to prioritize critical defects for further analysis. CR-83 is also equipped with advanced metrology capabilities, allowing for detailed characterization of defects. This includes the use of X-ray and electron microscopy, chemical etching and atomic force microscopy to ensure accuracy and reliability. ADE / KLA / TENCOR CR-83 is an excellent choice for semiconductor fabrication, providing excellent accuracy, scalability, and flexibility. With its wide range of features and capabilities, the asset can perform high-precision mask and wafer inspection, quickly identifying defects, providing the highest quality assurance for semiconductor fabrication.