Used EPI 930 #9171186 for sale

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Manufacturer
EPI
Model
930
ID: 9171186
MBE System.
EPI 930 is a Molecular Beam Epitaxy (MBE) equipment made by Riber, Inc. It is a multi-column, high-vacuum processing system capable of growing epitaxial materials with the highest quality and extreme precision. It is typically used to manufacture integrated circuits, solar cells, and other optoelectronic devices. 930 features a six-column, or "gull-wing," lay-out that makes it well-suited for multi-layer growth, such as a superlattice or heterostructure. The columns are positioned such that the various effusions cells, sources, guns, and valves are all centered in the center of the unit. This allows all of the reagents to travel parallel paths to the substrate at minimal losses. This in turn enables the user to grow a variety of materials such as GaAs and InP. The machine boasts a high-vacuum environment (<1E-9 mbar) that is constantly filtered and regulated using a turbomolecular pump backed by a cold trap and an ion getter. This allows for the cleanest possible growth environment to maximize quality and precision. Additionally, a remote chamber base pressure monitor ensures that the equilibrium pressure is maintained at all times. Furthermore, a low rate polysilicon source is integrated in EPI 930 to better control the background doping of as-grown layers. In order to control temperature and facilitate growth, 930 features a low-thermal mass e-beam evaporator, a load-locked wafer heater, and a gas dosing tool. The load-locked wafer heater is in direct contact with the substrate, ensuring precision and uniform heating. It is capable of temperatures up to 700 °C, allowing the user to grow a variety of semiconductors, metals, and alloys. Moreover, an integrated software controller allows for easy and precise manipulation of the reagents from a single central console. This allows lower cost-of-operation and reduced material waste. Additionally, EPI 930 asset is built on a vibration-free air floating foundation that prevents any motion-based errors. This enables the highest levels of precision and production yields. Overall, 930 is an advanced, multi-column MBE model that enables the fabrication of high-precision integrated circuits, solar cells, and optoelectronic devices. This equipment is highly capable of fabricating a range of materials with excellent precision and a reduced cost-of-operation.
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