Used AAT 9600 #155478 for sale

AAT 9600
Manufacturer
AAT
Model
9600
ID: 155478
Closed loop batch washer.
AAT 9600 is a 'other wafer processing' equipment specifically designed for the production of high-quality, uniform wafers. This system features ultra-low surface roughness values to ensure that the wafers produced have the highest texture quality available in the market. 9600 can process substrates of different sizes, ranging from small to large (up to 200mm). Its top-tier Metz Technologies P90 rotating electroplating head ensures uniform thickness, uniformity of planarization, and improved gap filling. The substrate is held on a highly accurate positional stage, ensuring that all parts of the wafer are uniformly processed. Its process control capabilities allow for precise adjustments in deposition rates, thickness, and uniformity. AAT 9600 also features a number of automated controls, such as alarm reporting, auto-calibration, and remote monitoring. This allows the unit to be monitored remotely, improving the efficiency of its operations. The machine also features a user-friendly interface, allowing users to easily control the process parameters and to program the tool for optimized performance. In terms of wafer processing capability, 9600 is capable of performing cavity filling, deposition, and coating. The asset is also capable of performing a number of post-processing steps, including chemical-mechanical planarization (CMP), back-side plasma cleaning, and chemical etching. These processes can also be used for depositing precise dielectric films, sputtering and polishing, and texturing, ensuring high-quality wafers. Overall, AAT 9600 is designed to produce wafers with the highest surface quality, regularity, and uniformity in the industry. Its precise process control and automation capabilities ensure optimal performance and reduced costs. Furthermore, this model can process substrates of different sizes, making it an ideal choice for the production of high-quality wafers with reliable performance.
There are no reviews yet