Used DNS / DAINIPPON SK-2000 #118481 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

Manufacturer
DNS / DAINIPPON
Model
SK-2000
ID: 118481
Wafer Size: 8"
Vintage: 2003
Spin coater / Developer DUV track system, 8" Wafer flow direction: L-type Wafer type: Notch IF-B Spinner unit configuration: (2) Coaters B-ARC (2) Coaters (3) Developers Indexer: Left type Wafers: SEMI Standard wafers / Notch type Standard type (4) Uni cassettes Coater: SC1 (Unit 3) & SC2 (Unit 4): Includes: Cups EBR Function Resist lines: 8 Line Resist pump: PDS-105G-KPV4 Cup rinse function Back side rinse Cup rinse Pot rinse EBR (Edge bead removal) Prewet function SC3 (Unit 5) & SC4 (Unit 6): Cups: 1 Includes: EBR Function Resist pump: PDS-105G-KPV4 Resist lines: 4 Line Cup rinse function Back side rinse Cup rinse Pot rinse EBR (Edge bead removal) Prewet function Bake: HP: (6) Units (8, 9, 11, 12, 17, 18) RHP: (8) Units (25, 26, 28, 29, 31, 32, 35, 36) CP: (7) Units (7, 10, 16, 24, 27, 30, 34) AHL: (3) Units (13, 14, 15) EEW: Unit (33) Developer: SC1 (Unit 3) & SC2 (Unit 4): Cups Developer number nozzle DIW Rinse nozzle Back side rinse line Flow meters with sensor: DEV, DIW1, DIW2, Back-side rinse, ORG, FWD Includes: Dev1 Prewet DIW1 Back side rinse TR Includes: TR1 Arm TR2 Arm TR3 Arm Others: Thermo controller model: CET-CU, Mass 7kg THC Model: SPC-2313-UC-A CP Controller model: FRD-A200-UC HMDS Supply type: Quart bottle to buffer tank Thinner supply type: Canister tank Developer supply type: Facility supply EEW: Unit (33) Lamp house type with lamp house Miscellaneous: Signal tower lamp: 3 Color (Red, orange, green) Sub module configuration: Source bottle cabinet SC Cabinet ETU Cabinet Controller cabinet IFB ACU Cabinet Input power supply box Main gas valve close Gas (Air, N2) line purge Chemical (Developer, DIW) line purge Drain PCW end capping Gas line (N2) end capping Chemical (Developer, DIW) line end capping Spin unit (Coater & developer) exhaust line caping Bake unit exhaust line caping Leak check Main power: 3 Phase, 200 V, full load 20.44 kVA, 59A 50/60 Hz, 3 Wires and GND/PE Rating 400A, AIC 65kA, motor 8A 2003 vintage.
DNS / DAINIPPON SK-2000 is a high-performance photoresist equipment developed for the processing of micro-fine patterns. The system utilizes a unique, advanced, precision-camera imaging unit designed to provide perfect registration and exposure control, as well as allowing the use of a wide range of photo resist materials. For optimal exposure and greatest flexibility, both contact and projection tools are available. The advanced contact exposure tool produces extremely high-quality image registration, providing a perfectly uniform exposure across the entire surface of the photomask. The projection exposure tool is designed to reduce distortion of fine devices through the application of a high-accuracy optical machine, which ultimately increases exposure accuracy, linearity and yield. The tool also offers advanced capabilities such as sub-micron resolution, 0.15 micron minimum exposure uniformity and exposure stability control features. The sub-micron resolution ensures that extremely small lithography features can be achieved with excellent accuracy and detail. The exposure stability control features allow for precise adjustments to not only the exposure level but also the duration, which are critical for consistent results. The asset boasts of a high-speed mode for ultra-high-temperature exposure, increasing throughput and reducing process time. Another feature of this model is its ability to switch exposure wavelengths from a single source, enabling multiple sensitivities to be utilized for different exposure types. About DNS SK2000 photoresist equipment, the design offers strong robustness to temperature variation and reduces particles significantly, increasing overall exposure reliability. Overall, this system offers an optimal solution for lithography applications requiring ultra-fine patterns.
There are no reviews yet