Used FSI / TEL / TOKYO ELECTRON Mercury #9065484 for sale

FSI MERCURY is a state-of-the-art advanced photoresist equipment. Photoresists are used to selectively shield or expose areas of silica-based or other types of optical surfaces to form integrated optical components. MERCURY is a thermally-stable advanced proton-beam photoresist with electron-beam stability and resolution. FSI MERCURY photoresist system consists of four components: a two-coat formulating chemistry, a two-layer planarizing top-coat coating, a two-coat spin-on post-exposure stiffening coating, and a two-coat interlevel dielectric coating for improving reflectivity. The formulating chemistry consists of two main ingredients: photoinitiator and resist formulation. The photoinitiator produces the reactive species essential for the resist formation, while the resist formulation acts as a binder that determines the photoresist characteristics. By controlling the concentration of these two ingredients, the desired resolution of the photoresist can be achieved. The two-layer planarizing top-coat creates a flat, planar surface upon exposure to the photoresist. This layer improves the resolution and pattern fidelity of the photoresist pattern. The two-coat spin-on post-exposure stiffening coating increases the planarizing effect of the top-coat and increases the photo-hardening of the photoresist and also provides additional planarizing effects. The two-coat interlevel dielectric coating improves the reflectivity of the patterned photoresist layer, increasing the accuracy of the optical components. MERCURY photoresist unit has excellent resolution and pattern fidelity and allows for submicron exposure to the photoresist. It has a low absorption coefficient and a low etch factor and is ideally suited for a variety of applications such as complex integrated optical circuits and micro-optics. FSI MERCURY photoresist machine is robust and thermally-stable, making it well suited for industrial applications. It also has excellent adhesion and etch resistance, making it Ideally suited for long-term reliability and repeatability. MERCURY photoresist tool is cost-effective and provides stability and reliability, making it ideal for advanced integrated optical devices.