Used FSI / TEL / TOKYO ELECTRON Mercury #9137915 for sale

FSI / TEL / TOKYO ELECTRON Mercury is a photoresist equipment that is used in the photolithography process for the production of semiconductor chips. It employs deep ultraviolet (DUV) resists, which are designed for use with photolithographic steppers. This system is comprised of a closed-loop processing unit with an automated machine controller, a transparent reservoir, and a precision spin-coater. The tool controller is designed to meet the needs of a range of wafer sizes and production volumes and is capable of accurately and precisely controlling the spin-coater. The controller is linked to an integrated process database which can optimize the process variables for each application. Additionally, the asset has a high repeatability of results with an outstanding levelling accuracy and uniformity on each wafer, which ensures yield and quality consistency. The model's reservoir is a transparent, low-pressure silicone reservoir with a precisely designed transfer volume that is suitable for automated film application. It is easy to maintain and enabling it to be used for various film types, such as dilution resin and the use of organic solvents. The spin-coater is a high-precision device for spinning out thin films and contains a silicone cake which enables evenly thick films with the help of horizontal spinning on the wafer. Additionally, the controller is linked to the spin-coater, allowing for the precise adjustment of parameters such as speed, pressure, and time to be adjusted for each application. The whole equipment is designed to provide ultra-violet (UV) imaging for the patterning of various thin films, resists, dielectrics, and metals. It provides superior performance for single and double-layer dielectrics which also allows for double-patterning and precise etch selection. This system also includes different types of coater technologies, such as spray and spin-coating, which are suitable for all types of substrates. This enables the unit to be used for a variety of processes, from large-scale production to research and testing applications. FSI Mercury is a highly advanced, automated photoresist machine which provides improved performance compared to traditional photolithography systems. It is designed for maximum flexibility and enables users to perform complex patterning processes on a single piece of equipment.