Used SEMITOOL 480 #9105787 for sale

SEMITOOL 480
Manufacturer
SEMITOOL
Model
480
ID: 9105787
Spin Rinse Dryers (SRDs) PSC101 controller.
SEMITOOL 480 is a high-performance photoresist equipment designed to provide optimal coating performance for a variety of wafer and substrate processes. The system has a unique dual-showerhead coathead design, providing superior uniformity and consistency for a wide range of applications. The high-precision MCA (multi-chamber application) unit provides the exact concentration of developer, resist, and etchant needed for each process step. In addition, the optimized PWB (Programmable Wall Bias) control module offers programmable process control for high-volume production. The machine is equipped with state-of-the-art process monitoring systems. This includes SEMITOOL 4340 controller, which uses intuitive touchscreen menus and scenarios for full process control. As well as a feedback control loop, allowing easy set-up and modification of process parameters. The tool is also provided with a height measurement sensor for higher accuracy in critical or temperature-sensitive applications. 480 asset is designed to be highly reliable, with a modular design allowing easy access for routine maintenance. It is available in two racks, with six chamber applications from wafer sizes up to 30-inch diameter. The model also offers exceptional environmental compatibility, featuring a wide range of process-associated materials to suit any application. The equipment is equipped with a range of power protection features, including active and passive ESD protection. In addition, SEMITOOL 480 has an advanced optical recognition system, designed to provide rapid identification of substrates and process changes. The unit can detect substrate type and patterning steps in less than 1 second. The machine is designed to support cleanroom ISO-5 and US-EPA standards, and can be specified for RoHS and non-RoHS applications. 480 is a cost-effective and efficient solution for advanced photoresist coating processes. It offers outstanding performance for high-volume production and process consistency, while also providing a safe and environmentally friendly tool. With its robust design and intuitive process control features, SEMITOOL 480 ensures maximum accuracy and reliability for today's photoresist coating processes.
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