Used SEMITOOL PSC-101 #9194999 for sale

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Manufacturer
SEMITOOL
Model
PSC-101
ID: 9194999
Vintage: 1997
Spin rinse dryer Upper controller 1997 vintage.
SEMITOOL PSC-101 Photoresist Equipment provides precise, reliable solutions for cleaning and coating wafers with photoresist. This is accomplished with an automated cassette to cassette wafer handling process, ensuring a consistent result every time. The system is state of the art with modern computer software, advanced controllers, and high-resolution monitors. SEMITOOL PSC 101 is designed to have a high level of process control with an integrated PC-based processing computer. This allows for enhanced features such as prepping tasks before a lot is processed, work group management, and remote monitoring capability. Users are also provided with the ability to store data and settings for a particular process for repeated use. The unit has a high-resolution monitor, allowing the user to visually inspect photoresist coating thickness and uniformity. It also features a fast and reliable monitoring machine that can detect photoresist out of specification. The tool also features a wafer inspection option that will detect surface defects. PSC-101 is equipped with an automated hot-plate that is designed to provide a uniform and consistent photoresist temperature across the entire wafer in less than 10 seconds. This ensures consistent quality for all wafers. The photoresist is applied using either a dispense method or spin-coating with an adjustable spin speed. This ensures repeatable results throughout processing. The photoresist asset is equipped with two thermal cleaning chambers that can be preheated and temperature controlled for effective cleaning. These are then followed by a large capacity washing option that enables high-speed, efficient wash times. The photoresist model is vented to allow for safe, efficient operation. The operation of PSC 101 is designed to be user-friendly with a clear menu-driven interface provided for all equipment operations. This allows users to pick from a variety of options and monitor the status of a process at any time. It also provides multiple alarms to alert users of any process issues, allowing for quick response. Overall, SEMITOOL PSC-101 Photoresist System provides a reliable and efficient solution for handling and coating photoresist. With automated cassette to cassette wafer handling, the unit is designed to provide consistent results and can be adapted to fit various applications. Its user-friendly interface also ensures an easy to use machine that allows users to quickly and accurately monitor the status of processes.
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