Used AG ASSOCIATES 4100 #9147789 for sale

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AG ASSOCIATES 4100
Sold
ID: 9147789
Wafer Size: 6"
Rapid thermal processors (RTP), 6".
AG ASSOCIATES 4100 rapid thermal processor is a powerful and reliable tool for advanced semiconductor fabrication. 4100 features an advanced design that provides high throughput and the ability to rapidly process large wafers in batch mode. The device supports multiple processes including oxidation, annealing, dopant implantation, nitride deposition, and rapid thermal processing. The unit is equipped with a gas-purge system and a variety of temperature-monitoring sensors for accurate process control. AG ASSOCIATES 4100 has an integrated microprocessor-based controller with various programmable temperature profiles. This processor allows for customized temperature profiles for each wafer which improves reliability by ensuring uniform process times and temperatures. The user can also program adjustable functions such. as temperature ramp rates, zone control, and tolerances. The unit is also equipped with a rotating chamber to accommodate four wafers at once. The chamber is rotated and slid between multiple heating and cooling regions, providing uniform temperature control for each wafer. This ensures uniform heating and cooling rates, increasing wafer throughput. An automatic gas purge function is available to reduce potential contamination during handling of the wafers. The purge gases are stored in external tanks and monitored by gas flowmeters. 4100 features a ceramic core design that allows for efficient thermal dissipation during rapid thermal processing. The unit also includes a water chiller to drop the temperature of the jacket quickly depending on the desired cooling rate. This ensures uniform cooling of the wafers and maintains temperatures to +/- 5 degrees C during operation. AG ASSOCIATES 4100 is equipped with an advanced monitor and control system, which allows for easy monitoring and precise control of the temperature. A variety of alarms are included to alert users of potential problems and ensure safe operation. With its versatile design capabilities, 4100 is an effective and reliable tool for semiconductor fabrication.
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