Used AG ASSOCIATES Heatpulse 610 #9175565 for sale
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ID: 9175565
Vintage: 1997
Rapid Thermal Processing (RTP) system
Bench top
Single chamber
No gas detector
Single wafer process
Single rotometer controlled gas channel
Multistep process cycle capability
Quartz tray wafer diameter, 6"
Programmable ramp up rates: 10°C-250°C/sec
Operating temperature range: 450°C-1250°C
Peak temperature: 1,200°C
Processing cycle: 1-600 sec
PC Controller with flat screen monitor
Pyrometer temperature control
Thermocouple
Input power supply: 208 V, 3 Phase, 60 Hz, 125 A
1997 vintage.
AG ASSOCIATES Heatpulse 610 is a rapid thermal processor (RTP) designed for high production throughput and process uniformity. The processor utilizes a continuous vacuum-sealed furnace with four-zone temperature control to quickly and consistently process samples. The four-zone control allows for precise temperature control across the sample width, reducing over cool and over heat issues. AG ASSOCIATES HEATPULSE 610 has a bonding area of 610 x 485mm with a capacity of up to 60 wafers, and can heat to a maximum temperature of 1000°C. The precision heater elements have a thermal stability of ±0.5°C. A variable rate gas flow is used to control the thermal environment of the furnace process, ensuring uniform process temperature across all wafers. Heatpulse 610 offers a wide variety of process recipes, including low melting temperature alloys, anneal, diffusion, high temperature/high heat release, oxidation, and vacuum anneal. It also supports specialty processes such as deformation bonding and MEMS. All processes are controlled using an onboard controller and high level recipe programming. HEATPULSE 610 has a durable, glass-aluminum construction with a four-screw access door and a viewing port. It is well-suited for industry environments such as semiconductor or microelectronics, photovoltaic, MEMS, and aerospace. The processor is user-friendly, featuring intuitive touchscreen and customizable displays that offer real-time process monitoring. It also offers advanced error detection and prevention capabilities for dependable production outputs. Furthermore, AG ASSOCIATES Heatpulse 610 is equipped with software packages that make data analysis, control, and monitoring easier for the user. These tools market time- and cost-savings in production processes, allowing for higher yields and a faster return on investment. To ensure reliable performance, the processor is covered by a one-year warranty. AG ASSOCIATES HEATPULSE 610 also provides services, such as training and technical support and preventative maintenance options, to help customers maximize their investment and derive the maximum value from the processor.
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