Used AG ASSOCIATES Heatpulse 210T-03 #9171173 for sale

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ID: 9171173
Vintage: 1987
Rapid thermal processor 1987 vintage.
AG ASSOCIATES Heatpulse 210T-03 is a rapid thermal processor designed for use in advanced device fabrication processing. It offers a compact and cost-efficient solution to heat treatment needs, allowing users to ramp up to high temperatures quickly and safely. The equipment features a 6-inch diameter chamber and a X-Y movement stage, which provides an accurate and repeatable heat treatment process. It is suitable for chamber pressures up to 600 mtorr and temperatures from 25oC to 800oC, allowing the system to be used in a variety of applications. The unit is equipped with fast-response heating elements, allowing the user to rapidly achieve uniform temperatures across the entire chamber. Additionally, the machine has precise temperature control capabilities, allowing for temperatures up to 200oC to be achieved within seconds. Heatpulse 210T-03 can be used in a range of applications, including annealing, dopant activation, gate processing, anode oxidation, and oxide etching. For these processes, a range of materials can be used, including metals, polysilicon, and silicon nitride. The tool is also suitable for athermal processes, where a rapid ramp-up and ramp-down is required. The asset features a number of safety features, including over-temperature protection, gas leak detection, and process monitoring. This helps to ensure that the model is operating in a safe and reliable manner. Additionally, the equipment also features real-time recording and data logging, which provides the user with data on the performance of the system. This data can be used for process feedback and optimization. Overall, AG ASSOCIATES Heatpulse 210T-03 is an advanced rapid thermal processor engineered for rapid and precise heat treatment applications. It offers repeatable and reliable results, along with comprehensive data logging and real-time monitoring. The unit is suitable for a wide variety of processes and materials, and it is capable of reaching temperatures up to 800oC quickly and safely.
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