Used AG ASSOCIATES Heatpulse 610 #9199960 for sale

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AG ASSOCIATES Heatpulse 610
Sold
ID: 9199960
Vintage: 2013
Rapid thermal annealing system 2013 vintage.
AG ASSOCIATES Heatpulse 610 is a powerful rapid thermal processor (RTP) that offers rapid annealing, oxidation, diffusion, and recrystallization processing needs. The equipment is designed for research and development, production, and characterization studies. The main features of AG ASSOCIATES HEATPULSE 610 include high temperature uniformity and repeatability, fast ramping capabilities, and a low thermal mass in a compact design. Heatpulse 610 is a batch system consisting of 4 independently controlled heater elements. It allows up to four wafers to be processed at a time. The maximum temperature is 2000oC and typical ramp rates range from 300K/sec to 5K/sec. The high temperature uniformity of HEATPULSE 610 results from its advanced temperature drift compensation and water cooling design. In addition, the wafers can be easily loaded and unloaded through its vacuum door. AG ASSOCIATES Heatpulse 610 has a variety of advanced process control features. It is equipped with a 64-bit operating unit with intuitive graphical user interface. This allows users to easily setup and monitor the experimental conditions. It also has options for automated recipe creation and execution as well as advanced data logging and analysis. AG ASSOCIATES HEATPULSE 610 is highly configurable and is capable of performing a variety of anneal and deposition processes. The machine is capable of rapid annealing, oxidation, diffusion, and recrystallization processes. It has a diffusion chamber with gas delivery tool for multiple gas species and pressure parameters. The asset also has two crucible boats for sintering and oxide deposition. Overall, AG ASSOCIATES 610 is an ideal rapid thermal processor for research and production requirements due to its fast ramping, low thermal mass, high temperature uniformity, and configurable process features. Its intuitive interface allows users to easily program and monitor processes. It is also capable of various annealing, oxidation, diffusion, and recrystallization processes. Heatpulse 610 is ideal for use in a variety of research and development, production, and characterization studies.
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