Used AG ASSOCIATES Heatpulse 8108 #9196230 for sale
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ID: 9196230
Wafer Size: 5"-8"
Vintage: 1995
Rapid thermal processor annealing system, 5"-8"
Electronics
Mass flow controlled gas handling
Cooling
ULPA Filtration
Mechanical assemblies
Silicon dielectric growth
Implant annealing
Glass re-flow
Silicide formation and annealing
Nitridation of metals
Contact alloying
Oxygen donor annihilation
Wafer handling: Automatic serial processing
Standard cassettes
Throughput: Process dependent
Ramp-up rate: Programmable
1 – 180°C Per second
Steady-state duration: 1 – 600 Seconds per step
Ramp-down rate: Programmable
1 – 180°C Per second
Ramp down rate is temperature
Radiation dependent
Maximum 150°C per second
Steady-state temperature range: 400 – 1200°C
ERP Temperature accuracy: +3°C to -7°C
Calibrated against an instrumented thermocouple wafer (ITC)
Temperature repeatability: + 3°C
Temperature uniformity: + 5°C
1995 vintage.
AG ASSOCIATES Heatpulse 8108 is an advanced, rapid thermal processor capable of high-level performance. It is designed to accelerate the rapid thermal processing of a wide range of materials, including ceramics, metals, polymers and composites. It incorporates a wide variety of features that make it ideal for rapid prototyping, research and development, and manufacturing production. AG ASSOCIATES HEAT PULSE 8108 is a single-chamber, programmable equipment with two high-torque, hot-air fans providing optimized results at the necessary temperature. These fans can be adjusted independently to enable precise temperature control, while cooling at a rate up to three times faster than standard temperature-controlled batch furnaces. The maximum temperature of this furnace is 1200°C and it has a hearth plate size of 300mm. It has a built-in automatic water-cooled hydraulic system that shuts off the furnace in the event of over-temperature or over-pressure. The intelligence of HEATPULSE 8108 is managed through a user-friendly touch-screen interface with a comprehensive menu structure and intuitive display. It is easy to program and monitor the process through this interface. The processor also features a computer connection, allowing multiple users to access the unit from their own workstations or networked computers. It also supports software tools such as Quick-HeatingTM to enable rapid cycle time and multiple recipe storage. Other features of AG ASSOCIATES HEATPULSE 8108 include a gas distribution machine, a built-in temperature ramping program to optimize thermal profiles and a stainless steel shell inside with a ceramic lining that helps to protect fragile materials from thermal shock. Moreover, it is also equipped with an automatic alarm tool and a fault tolerant design for reliable operation. Together, these features make HEAT PULSE 8108 a reliable and flexible rapid thermal processor.
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