Used BOC EDWARDS Helios-S #9203027 for sale

ID: 9203027
Vintage: 2002
Gas abatement scrubber system 2002 vintage.
BOC EDWARDS Helios-S is a rapid thermal processor that is designed for use in the semiconductor industry. It is one of the most advanced rapid thermal processing (RTP) systems available on the market today, and it is ideal for use in applications which require precise temperature control and uniform heat distribution. Helios-S uses advanced control software to ensure precise temperature control throughout each cycle. It can provide up to three temperature set points per cycle and can accurately monitor and control temperatures from 30℃ to 1250℃ with its built-in PID controller. The equipment is also equipped with a two pellistor sensing system and multiple channel output for thermal mapping. Moreover, it has a range of safety features that prevent dangerous overheating scenarios from occurring. These include things such as an over-temperature and an over-current automatic cut-off unit. The machine is made up of two components; the main chamber and the heating tool. The main chamber is constructed with a quartz wall, which has a total of four heating zones and an integrated gas delivery asset. The heating model is composed of three sealed cartridges of halogen lamps that evenly distribute heat in the chamber. This ensures uniform temperature across the entire surface of the substrate being processed. The equipment's advanced programmability and range of thermal profiles mean that it can be used for processes such as oxidation, diffusion, deposition, etching, and implantation. Moreover, the included scanning system allows for precision alignment to ensure processes occur exactly where you want them to. All in all, BOC EDWARDS Helios-S is an incredibly powerful and highly accurate rapid thermal processor. It offers unprecedented temperature control, uniform heat distribution, and reduced cycle time, making it the ideal choice for companies looking to produce high quality and high-performance semiconductor devices.
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