Used MPT RTP-600XP #9027274 for sale

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ID: 9027274
Wafer Size: 2"-6"
Vintage: 2004
Rapid thermal processor, 2"-6" Applications: RTA, Annealing, Implant Activation, Oxidation & Reflow Thermal processing: Si, Ge, Si/Ge, GaAs, InP and Other semiconductor materials Temperature range rate: 250-1300°C Temperature ramp rate: 1-200°C/sec Quartz process chamber, Capable of handling inert and Reactive gases Dual color pyrometer with Auto-Calibration feature (2) MFC Controlled gas channels; Upgradeable to 6 channels Integrated Windows NT based pentium processor Software revision 3.10 208 V, 60 Hz, 3-Ph, 80 A 2004 vintage.
MPT RTP-600XP is a Rapid Thermal Processor (RTP) designed to handle a wide selection of thermal processes in various industries. This equipment utilizes a direct thermal coupling system, which enables precise temperature control and rapid heating for high-speed processes such as annealing, oxidation, nitridation, and diffusions. RTP-600XP unit has a chamber size of 476x406x127mm, which is suitable for larger processing projects. Its heavy-duty and durable chamber construction provide maximum reliability and uniform heating. The machine also has a vacuum capability, which is ideal for special processes like out-gassing. MPT RTP-600XP has a low thermal mass thermal transport tool, with a specially designed thermal profile generator (TPG), which features an independent time and temperature curve control. This asset's unique design ensures the best thermal results with minimum distortions. It also has an open-atmosphere heating capability, which allows the controlled combination of vacuum and pressure processes. RTP-600XP model features advanced control and optimization functions, such as auto-tune, which makes it easy to pre-program thermal curves and save them for future use. It also has a feature for accurately controlling the pre-heat time, helping to ensure the highest possible precision. MPT RTP-600XP is an excellent equipment for high-precision temperature sensors, allowing for better control of processes. It offers uniform, clean, and stable results. With its ability to process a variety of applications, RTP-600XP is ideal for a wide range of industries seeking efficient and reliable thermal processing.
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