Used STEAG / MATTSON / AST 2800 #9137937 for sale

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ID: 9137937
Wafer Size: 8"
Rapid thermal annealers, 8" SMIF.
STEAG / MATTSON / AST 2800 is a Rapid Thermal Processor (RTP) designed for rapid, uniform heating and cooling of semiconductor wafers. This equipment is a highly versatile and effective thermal tool for a variety of temperature sensing and control operations, making it ideal for research and production applications. AST 2800 features a reliable and accurate dual chamber design with 25 cm by 25 cm process area per chamber. This expansion of available space allows users to stack multiple substrates, greatly increasing throughput and productivity. Additionally, a protective, inert gas flow system envelops the process area, preventing contamination of the semiconductor materials. The high throughput is further enhanced by the short thermal cycle times, typically able to reach temperatures of up to 1200ºC in a fraction of a second. The highly accurate temperature and process control is an advantage of STEAG AST2800. This is possible due to the advanced PID-based control unit that can manipulate the setpoint, dwell times, ramp-rate and maximum temperature. In addition to these parameters, the machine includes advanced low-flow logic for optimizing process applications. This helps to further maximum temperature control and tool accuracy. The precision temperature control and rapid thermal cycle times are characteristics that make AST AST2800 the ideal choice for technologically complex hardware and process operations. The reliablity, accuracy and efficiency of 2800 makes it the ideal choice for mission critical processes. The graphite susceptor heating elements and proprietary direct-cooling asset greatly reduces the chance of defects, resulting in more reliable semiconductor materials. The heat up protocols also allow users to input their own specific heating and cooling characteristics, ensuring highly accurate processing operations that optimize thermal cycling and uniformity. In conclusion, MATTSON 2800 is a reliable, accurate and efficient rapid thermal processor, making it the ideal tool for high-tech process applications. This model provides an inert gas flow equipment for protection during thermal cycling, as well as a dual chamber design with 25 cm by 25 cm process area per chamber, allowing increased throughput. The advanced PID-based control system allows users to input specific heating and cooling parameters for precise control, while the proprietary heat up protocols optimize thermal cycling. All of these features come together to make MATTSON AST2800 an indispensable tool for reliable and accurate thermal processing.
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