Used TEL / TOKYO ELECTRON / WAFERMASTERS SA0150LP #181495 for sale

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TEL / TOKYO ELECTRON / WAFERMASTERS SA0150LP
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ID: 181495
Wafer Size: 6"
Copper annealing oven system, 6" Currently warehoused.
TEL WAVERMASTERS TEL / TOKYO ELECTRON / WAFERMASTERS SA0150LP is a rapid thermal processor used for through-silicon via (TSV) manufacturing, as well as other complex applications in semiconductor processing. It is used for annealing and rapid thermal annealing (RTA) of tight metal lines, to create ultra-thin interconnects and distribute them strategically on a product's surface. This processor is essential to the creation of the most advanced integrated circuit components, as it allows for the modification of TSV layouts and the uniform application of heat across an entire wafer. In terms of its specifications, WAFERMASTERS WAVERMASTERS TEL SA0150LP rapid thermal processor has an open-platform architecture that allows for flexibility and optimization of throughput. It is equipped with two independently-controlled heated stages capable of heating 300mm (12 inch) wafer substrates up to 1,000°C in less than 2 minutes. A wafer temperature accuracy of +/-2°C is achievable in less than 90 seconds. It also is designed to maximize its cooling rate in order to keep working temperatures within an optimal range, preventing damage to the delicate structures on the wafer's surface. Using this device, up to 250 wafers per hour can be processed, depending on the required process. It is particularly well-suited to advanced process requirements such as metals, dielectrics, and intermetallics, due to its sophistication and the functionalities that it offers. The user has access to up to 16 high precision gas delivery points, enabling the precise application of chemistries for a wide range of process technologies. TOKYO ELECTRON WAVERMASTERS WAFERMASTERS SA0150LP rapid thermal processor is equipped with a wide range of safety and protection features, including optical pyrometers that give users a real-time visual reading of substrate temperature, as well as multiple layers of interlocks that ensure that all safety conditions are met before processing begins. Furthermore, its software is designed to ensure that the wafer never exceeds optimal temperature parameters, preventing over-processing, errors, and other risks. All in all, TEL / TOKYO ELECTRON / WAFERMASTERS WAVERMASTERS SA0150LP is an advanced and reliable rapid thermal processor, allowing users to achieve even the most complex tasks quickly and securely. It offers precision, speed, and high throughput, making it an ideal choice for high-end semiconductor processing applications.
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