Used ULVAC MILA-3000 #9133505 for sale

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ID: 9133505
Vintage: 2003
RTP System 1200°C, 15 mm 2003 vintage.
ULVAC MILA-3000 is an industrial-level, rapid thermal processor specifically designed to conduct a broad range of thermally-driven processes. This equipment provides unparalleled speed and efficiency to outpace many conventional methods that are too slow for today's production needs. MILA-3000 can process up to 3000 parts per hour while achieving accurate, repeatable temperature states. ULVAC MILA-3000's externally-heated substrate carrier utilizes low temperature thermal energy for processing, while simultaneous power supply under programmable precision temperature control ensures uniform temperature distribution and higher production yields. This innovative platform also offers uniform and repeatable thermal processing at lower temperatures than traditional systems, while significantly reducing cost of ownership. MILA-3000 is equipped with a proprietary triple energy heating system which features three separate sensors to measure thermal energy with unparalleled accuracy and precision. These integrated sensors are able to detect changes in the environmental temperature (+/- 1 degree C) for maximum energy utilization efficiency. The unit is designed to optimize productivity by utilizing a high-power, low-cost solution to minimize waste and reduce the requirement for post-processing. In addition to temperature controls, ULVAC MILA-3000 is outfitted with an aluminum-base, combustible gas extraction chamber that quickly evacuates unwanted vapors produced during processing. This ensures that the machine is not only energy-efficient, but also is safe to use with hazardous materials as the chamber is designed to keep explosive gas concentrations below the safe level. For faster throughput, MILA-3000 features an automated, carrier-based cassette-loading tool. This is designed for the purpose of handling a variety of wafer sizes without the need for manual reloading and is capable of both in-line and offline operation. Moreover, compatible with all standard materials, this state-of-the-art rapid thermal processor is an ideal choice for high-volume production environments. In sum, ULVAC MILA-3000 is a robust, high-performance, rapid thermal processor with advanced intelligence and automation capabilities. It offers a cost-effective, energy-saving solution for ultra-fast temperature controls, excellent uniformity, accuracy, and repeatability. MILA-3000 is ideal for semiconductor designs, MEMS, OLED displays, and other thermal processes.
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