Used AIXTRON Crius 31x2" #9186418 for sale

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Manufacturer
AIXTRON
Model
Crius 31x2"
ID: 9186418
Vintage: 2009
MOCVD System 2009 vintage.
AIXTRON Crius 31x2 is a vertical, inductively coupled plasma reactor with 31x2 inch chamber suitable for a wide range of industrial applications. The equipment can be used for etching, deposition, and other surface treatment processes. It is designed to be a powerful and reliable solution for those looking to achieve high-quality products from their processes. The Crius 31x2 system offers a number of features suited for a variety of industries and applications. It comes equipped with an advanced RF generator, gas injection systems, precise temperature, pressure and plasma control and an advanced wafer transportation unit. It also features advanced data logging and reporting, to help monitor and optimize the manufacturing process. The Crius 31x2 has a rugged chamber design, which allows for processing of large wafers and higher throughput rates. It is equipped with a standard 8" susceptor, which can be upgraded for larger wafers if needed. The machine is perfectly suited for processes requiring high accuracy and repeatability, such meteorite etching and dielectric deposition. The tool uses a number of specialized process gasses, ranging from standard etching gas compositions to dielectrics and noble metals. The gasses are injected into the chamber via a pneumatic valve and multiport gas injection systems, allowing for precise gas control and metering. The low-pressure plasma generated in the chamber is maintained using a special RF generator, allowing for precise control and superior results. The Crius 31x2 is equipped with an advanced wafer transportation asset allowing for automatic loading and unloading of the chamber, which helps to speed up the process and reduce manual labor. It is also equipped with a specialized pressure control model, which helps to keep the chamber pressure at a constant level, improving process repeatability. Overall, AIXTRON Crius 31x2 is a powerful and reliable tool designed to assist in the manufacture of high-quality products for various industries. It offers high accuracy, repeatability, speed, and control, making it ideal for a number of industrial applications.
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