Used AIXTRON Tricent #9202043 for sale

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Manufacturer
AIXTRON
Model
Tricent
ID: 9202043
CVD System Currently warehoused.
AIXTRON Tricent is a military-grade, high-performance semiconductor epitaxial reactor and dielectric deposition tool. It produces epitaxial layers for high frequency HEMTs (high electron mobility transistors) and other advanced display applications such as OLEDs and LEDs. Tricent is designed for intensive medium- to large-scale industrial operations. It is capable of high throughput deposition rates and offers robust process repeatability between lots. AIXTRON Tricent consists of an internal furnace, typically using Rafoxide or APCVD (atmospheric pressure chemical vapor deposition) technology. An additional Susceptor bowl provides deposition of dielectrics over a range of substrates. It is equipped with automated load locks to minimize manual intervention, an enclosed hot wall design to minimize environmental contamination, and a horizontally mounted dual arm robot interface to maximize throughput. Tricent is engineered with a power supply and a plasma source that can tailor the ion flux and enable an ultra-clean, ultra-pure deposition environment. This makes it a suitable tool for producing challenging structures and devices which require low total ionizing dose (TID). As mentioned earlier, AIXTRON Tricent is capable of producing some of the highest deposition rates available for the semiconductor industry. Its wide range of deposition processes provide customers with options for high aspect ratio structures and complex etching such as line widths, sidewall orientation and doping profiles. Tricent's operator interface provides a range of user-friendly features for monitoring and controlling the processes. Additionally, the system is equipped with versatile control capabilities to precisely program process parameters and monitor in-situ film composition and layer performance. In general, AIXTRON Tricent is an efficient and reliable production tool for those working on state-of-the-art semiconductor device fabrication. Its advanced technology and capabilities, combined with its straightforward operation makes Tricent the perfect choice for maximum efficiency and improved yields.
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