Used ULVAC Entron T5 #9011097 for sale

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ULVAC Entron T5
Sold
Manufacturer
ULVAC
Model
Entron T5
ID: 9011097
Physical vapor deposition system.
ULVAC Entron T5 is a robust and efficient RF sputtering equipment designed for efficient deposition of thin films. It helps in increasing the productivity, longevity and performance of the system. Entron T5 features a compact configuration with a 5.7kW power supply and a round, top-fed design with a 5-axis motion control feature that enables the accurate, fast and repeatable deposition of different materials. The unit is designed for maximum precision and high power RF sputtering. It features a built-in drift set up and control rapid start-up with auto-tuning and torque control for precise control of power and uniformity. This RF sputtering machine is equipped with up to four process chambers with a vacuum pumping speed of up to 600 liters/min. The tool also offers flexibility in the loading and unloading of substrates. It has a gas control module with programmable process recipes and an eight band low-loss filtering. ULVAC Entron T5 is ideal for use in the semiconductor, LED, solar cell and optoelectronic industries. It can also be used for the preparation of masks for the fabrication of various materials as well as for thin film deposition. Entron T5 is a reliable and robust asset which is designed for repeatable and accurate deposition and boasts a wide range of process capabilities. Additionally, it features a multi-track display for monitoring results in real-time, accompanied by advanced software for monitoring process recipes, diagnosing errors and controlling operations. Finally, ULVAC Entron T5 has a soft-keyboard control pad and an intuitive graphical user interface, which helps the user to easily access and manage the process.
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