Used VARIAN XM 90 #9077097 for sale

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VARIAN XM 90
Sold
Manufacturer
VARIAN
Model
XM 90
ID: 9077097
Wafer Size: 8"
PVD system, 8" 4 to 8" wafer handling PC/PLC control system Turbo load lock CTI CT-8F cryo pump with compressor (3) Versamag target assemblies (3) A.E. MDX-5 DC P/S's ENI OEM-12 RF generator.
VARIAN XM 90 is a precision sputtering equipment designed for the deposition of thin film materials to the sub-ANGSTROM level. It is a highly versatile and efficient platform for the fabrication of thin films for semiconductor processing and metrology applications. VARIAN XM90 system utilizes a series of different sputtering sources, including a rotating water-cooled target, as well as gas-sustained and dc/rf sources, all of which can be individually controlled to provide a range of deposition possibilities. XM 90 consists of a controller unit, which has multiple IO and user interfaces to ensure easy operation. The controller allows the user to set parameters such as target rotation speed and chamber pressure, as well as providing feedback regarding thin film and substrate characteristics. XM90 also includes sensors and components to monitor power, temperature, and partial pressure, which allow for precise deposition control. VARIAN XM 90 incorporates a gas inlet and exhaust unit to maintain clean and contaminant-free operation. It also includes a programmable throttling machine capable of maintaining constant pressure within the chamber and controlling the distribution of reactant gases. VARIAN XM90 is designed to operate within a temperature range from -60 °C to +300 °C and is capable of depositing materials with a wide variety of characteristics. XM 90 comes with multiple configurations depending on the user's desired thin film deposition requirements. It supports both rotary and planar target systems, as well as a range of target materials such as metallic, oxide, diamond-like carbon, and dielectric. The tool can also be configured to enable the deposition of multiple layers at the same time. Overall, XM90 is a highly rugged and reliable sputtering asset capable of depositing thin films with sub-ANGSTROM precision. Its versatile and efficient design allows for precise thin film deposition, as well as easy operation and maintenance. With the ability to deposit multiple layers of material at the same time and its wide range of process parameters, VARIAN XM 90 is a powerful tool for thin film fabrication.
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