Used HITACHI S-9300 #9032647 for sale
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ID: 9032647
Vintage: 2001
CD Scanning electron microscope, 8-12"
Electron optical system:
Electron gun: SCHOTTKY Emission source
Electro magnetic lens:
3-Stage electromagnetic lens system with boosting voltage
Objective lens: (4) Openings click stop
Heated aperture is selectable / Adjustable outside the vacuum
Scan coil:
2-Stage electromagnetic deflection
Astigmatism correction via an 8-pole electromagnetic coil
Magnification: 1000x to > 300000x
Field control method: Continuously on for sample discharging at all voltages
Wafer imaging ability; Entire surface of 8” (or 12”) wafer
Depth of focus: >= 1.0 um at 80000x magnification
Resolution: 3 nm (800V) Retarding / Boosting mode
Hitachi probe tip
Power: 208 V 60 Hz 6 kVA 1 Phase
CD Measurement principle: Cursor and line profile measurement
Optical microscope system:
Image is monochrome
CCD Camera
Magnification is 110x
Wafer imaging:
X Coverage from 5 – 295 mm
Y Coverage from 5 – 195 mm
Notch down
Field of view: 1.2 mm
Accelerating voltage: 500 V to 1600 V, 10 V steps
Probe current: 4~24pA
Workstation:
Model: HP B180L (9GB)
O/S: Unix version HP-UX 10.20
Software version: 14.71
SECS / GEM Communication interface
Dual XY HITACHI micro scale
DSP Image processing
BSE Mode functionality
Multipoint measurement function
Edge roughness function
Automated image archiving function
Wafer handling system: (2) Cassette holders / ergo flippers
Convertible to 300 mm with conversion kit BRK-287006300
Water chiller unit
Main unit:
HV Controller
Lens PS unit
DEF PS Unit
Laser receiver unit
X-Axis laser unit
Laser linear scale cover
X-Axis excel precision PCB
Y-Axis excel precision PCB
STSensor PCB (R)
STSensor PCB (R)
STSensor PCB (L)
Secondary electron detection: SE and BSE electrons
Aperture ass'y
Ion pump 1, Ion pump 2, Ion pump 3 & controller
TMP1, TMP2 & controller
Stage controller
Display Unit:
Display of SEM and OM images, GUI operation screen
HP Workstation (B180L)
Keyboard & Mouse
FDD
MO Disk drive
System controller
ECPU 263 Controller
C-820A Controller
4500 COGNEX Controller
NMEN Controller
SIP Controller
PSDISP Controller
NSGVA Controller
EOCONT Controller
NOMAFC Controller
STAGE EBSI100 Controller
WT EBSI100 Controller
EVAC EBSI100 Controller
HV EBSI100 Controller
AMHSIO Controller
Power unit:
NIP Board
PS CN PCB
UPS Unit
Main power switch unit
ION pump power supply unit
Power distribution unit
Transformer unit
Port 1:
Door case
EFEM Unit:
Robot ass'y
Ceramic arm
Prealigner
Includes:
Load port 1
Load port 2
WT Controller
Chiller
Option:
Dry pump
Missing parts:
Display unit:
SIP Board
Cognex 4500 board
LAN HUB unit
HDD
Currently de-installed
2001 vintage.
HITACHI S-9300 is a scanning electron microscope (SEM) designed for advanced usage in the field of materials analysis. It offers a wide range of imaging capabilities including high magnification, superior resolution and a variety of ways to make images. HITACHI S9300's electron column is capable of astronomical magnifications up to ×570,000 with a 2.5nm resolution, allowing it to gain insight into areas where traditional optical microscopes are unable to reach. As a result, it can image both large and small structures with extreme clarity, making it ideal for microscopic analysis. The microscope is equipped with a lanthanum hexaboride (LaB6) field emission gun (FEG) and a CS-centered Schottky field emission gun (FE) that but permits higher performance at higher magnifications. Additionally, its multiple-focus setting allows users to switch between any two magnifications while maintaining a fixed focus. The SEM also boasts a comprehensive set of detectors, including a secondary electron detector, a field emission scanning electron detector, an energy dispersive X-ray detector (EDS), a wavelength dispersive X-ray detector (WDS), a monochromatic X-ray detector, and an X-ray fluorescent detector (XRF). This wide array of detectors enable users to more easily acquire data from whatever material they are examining. In addition, the SEM has a variety of preprogrammed imaging modes, such as backscattered electron imaging (BSE), accelerated voltage contrast imaging (AVM), reflected electron imaging (REI), and several imaging tomography modes. Overall, S 9300 is capable of producing incredibly detailed images of materials at high magnifications, while also having a wide range of detectors and imaging modes. Its features and capabilities make it a valuable tool for anyone looking to investigate the inner workings of materials.
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