Used ACCRETECH / TSK AD-2000T #9187561 for sale

Name: ACCRETECH / TSK AD-2000T
Brand: ACCRETECH / TSK
SKU: 9187561
Availability: SoldOut

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Scribing / Dicing

Manufacturer

ACCRETECH / TSK

Model

AD-2000T

ID: 9187561

Wafer Size: 12"

Dicing saw, 12" Frames and cassettes: 12" Infineon frame C66365-A0034-C068-03-0006 12" Infineon frame C66365-A0034-C068-03-0006 12" ePAK Resources EFF12-300-3,5-EM-59 12" Disco frame DTF2-12-1 12" Frame magazine metal (Infineon standard) Accuracy: Kerf off-center: < 5 µm (6σ) Kerf off-center Y1 to Y2 axis: < 3 µm (6σ) Z-Axis repeatability: < ± 1µm (6σ) Non contact set-up repeatability: < σ 2 µm (6σ) Difference between chuck set-up and non-contact set-up: Max 4 µm (6σ) Y-Movement (Y-axis for 1st and 2nd spindle): Closed loop system Effective stroke of each axis: min 310 mm Indexing setting range: 0,0001 (0,1µm) to 310 mm for Y-axis and for y-axis. Cumulative indexing error: < 3µm (6σ) at full range of 310mm (Y1-axis) Single indexing error: < 2µm (6σ) at full range of 5mm X-Movement: Effective cutting stroke: 310mm Stroke setting range: 1" - 12" Programmable cutting speed: 0,1 to 300mm/s Back movement speed 1000mm/s X-Axis straightness: < 3 µm (6σ) /310 mm Perpenticularity between X-axis and spindle shaft: < 8 arc sec (6σ) (1 arc sec = σ / 180 x 3600) Perpenticularity between X- and Y- axis: < 10 arc sec (6σ) Z-Movement: Minimum step: 1 µm (6σ) Effective stroke: > 14 mm (2" Blade) Z-Axis speed: 50.0 mm/sec Z-Axis repeatability: σ 1 µm (6σ) Theta-movement: Rotation angle: 0° - 320° CW and 60°CCW from initial point Rotation speed: 45°/sec Repeatability: ± 2 arc sec (6σ) Closed loop system Spindle: Temperature stable spindle Output: 1800W Rotation speed: Up to 60.000 rpm Dynamic vibration measured on any point of the spindle: Up to 55.000 rpm: < 0.5 µm Blade connection: ¾" Si-wafer cleaning system: Atomizing nozzle at cleaner (N2/DI water) Rotation range: 100 to 3000 rpm (Programmable) Time setting: 1 - 999 sec (Programmable) Stop position accuracy: ±1° Voltage: 210 VAC ± 6% 3 Phase 50 Hz ± 1% Compressed air pressure: 0,5 to 0,8 MPa 350 NL/min N2: 0,5 to 0,8 MPa 200N L/min Wheel coolant / Spinner cleaning water / Water curtain: 0,2 to 0,4 MPa 14 L/min Spindle coolant: 0,2 to 0,4 MPa 3,0 L/min Rinsing water: 0,2 to 0,4 MPa 1,0 L/min Duct capacity >5 m3/min.

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ACCRETECH / TSK AD-2000T Scribing / Dicing Equipment is a high-precision tool for processing semiconductor wafers and other substrates. The system is designed to enable the precise cutting of those materials in both scribing and dicing applications. TSK AD-2000T features a high-speed cutting head, a table for material support, and an advanced closed-loop control unit that delivers high-accuracy and repeatable results. The machine consists of a five-axis cutting head, which has a maximum feed rate of 4500mm/sec and a linear horizontal cutting velocity of 300mm/sec, and an XYZ linear table, which can accommodate substrates up to 900mm in size. The cutting head is designed to accurately and quickly scribe ultra-fine precision points, lines, and shapes in the substrates. The linear axes are driven by a direct-drive DC servo motor along with an advanced motion control tool that enable the asset to deliver high accuracy, repeatability and speed even when handling the smallest of features in the substrates. ACCRETECH AD-2000T also features a closed-loop control model that ensures precise scribing and dicing of the materials. The equipment can be used with different types of blades, including diamond scribing blades, carbide blades, and laser cutting heads. Additionally, AD-2000T can be equipped with an optional vision and image processing system that allows for error correction and improved process features. ACCRETECH / TSK AD-2000T also features a suite of advanced software tools for easy and repeatable parts programming. The software offers a comprehensive suite of CAD/CAM functionality, including 2D and 3D drawing, editing, nesting, and 3-axis graphic simulation. This enables users to program the unit quickly and precisely in both scribing and dicing applications. In addition, TSK AD-2000T's closed-loop control machine ensures a safe working environment and seamless integration into users' processes. This ensures an improved level of performance and repeatability in the processes. With its combination of advanced hardware and software, ACCRETECH AD-2000T provides an efficient and reliable tool for processing substrates in both scribing and dicing applications.