Used AMAT / APPLIED MATERIALS ATON 1600 #185058 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

ID: 185058
Vintage: 2007
SiN PVD Sputter systems (10) Chambers Currently de-installed 2007 vintage.
AMAT / APPLIED MATERIALS ATON 1600 is a sputtering system specifically designed for advanced technology applications in a wide range of industries. It is capable of depositing thin films on substrates such as silicon, gallium arsenide, and glass depending on desired specs. AMAT ATON 1600 features a high-energy random beam of ions that penetrate the target material, knocking off its atoms which then become a vapor before condensing onto the substrate. This process, called ion sputtering technology, provides better uniformity and density over traditional sputtering techniques and is capable of both deposition and etching. The system is equipped with three source cathodes, each capable of holding a maximum of 1.6KW. It has multi-target sputter sources for optimal chamber utilization. Its additional uniformity is enhanced through its digital flat-top electron control. It has a powerful 300 KW power supply with narrow pulse width modulation, providing a high process yield. Converted into low-energy ions, it is capable of sputter etching with reactive gases for different processing needs. APPLIED MATERIALS ATON 1600 also offers a 36-inch process chamber. Its mechanical design is capable of extracting deposition material with strong vacuum conditions. This allows it to achieve higher deposition rates and improved process yields with its increased pumping speed. It also features a set of standard sensors and controls, allowing users to monitor the process in real time. Its advanced automation is facilitated by a suite of easy-to-use software packages. This software suite is compatible with a wide range of data systems and enables complete process control. It can actively monitor and regulate the process parameters, including power, pressure, flow, temperature, and others. Overall, ATON 1600 is a reliable and premium quality sputtering system designed for today's advanced technology applications. It is capable of producing a wide range of materials for development in various industries, making it a go-to option for professionals requiring excellent uniformity, high process stability, increased throughput, and process yield.
There are no reviews yet