Used AMAT / APPLIED MATERIALS ENDURA #9150112 for sale

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ID: 9150112
Pre-clean chamber.
AMAT / APPLIED MATERIALS ENDURA Reactor is a revolutionary type of plasma-enhanced chemical vapor deposition (PECVD) equipment. It is a highly flexible and advanced system that provides superior film quality and performance in a wide range of deposition applications. The unit is designed to provide users with cutting-edge options for defining the parameters of their unique process, maximizing productivity and output at the same time. AMAT ENDURA Reactor is made of a single-chamber stacked design, allowing for multiple wafer capabilities of up to nine inch wafers or higher with a range of dummy wafers, ensuring uniformity of film quality to meet the demands of a wide variety of users. The fully automated solution is complemented by advanced process controller systems with capabilities ranging from low temperature precursor control to chamber pressure control and uniformity from substrate to substrate. The reactor uses edge biasing with special focusing plates and accurate wafer positioners for achieving uniformity of deposition. Accurate film performance is also ensured through APPLIED MATERIALS ENDURA Reactor's advanced process monitoring capabilities, including an in-situ mass spectrometer and reflectometer. ENDURA Reactor is also fitted with a load-lock machine for the integration of auxiliary processes and is available with advanced safety features and monitoring capabilities. AMAT / APPLIED MATERIALS ENDURA Reactor is versatile and user-friendly, allowing users to define their process parameters quickly and easily and quickly adjust them in response to changing requirements. AMAT ENDURA Reactor is energy efficient, helping to reduce energy costs, and is compliant to the highest safety standards ensuring a safe working environment. Overall, APPLIED MATERIALS ENDURA Reactor is a highly advanced tool offering superior film quality and performance in a variety of deposition applications. Offering multiple wafer capabilities, advanced process controller systems and in-situ mass spectrometer and reflectometers, users of ENDURA Reactor can quickly and easily adjust parameters for their desired application, reducing energy costs and increasing productivity at the same time.
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