Used AMAT / APPLIED MATERIALS ENDURA #9165615 for sale

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AMAT / APPLIED MATERIALS ENDURA
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ID: 9165615
Chamber.
AMAT / APPLIED MATERIALS ENDURA is a high-performance, full-field batch reactor for semiconductor device fabrication processes. Designed for use with a wide variety of etch and deposition applications, this reactor provides excellent process uniformity and repeatability. AMAT ENDURA reactor has two temperature zones, two gas zones, two power sources and two plasma sources, which can be used in combination to create the ideal conditions for a variety of semiconductor device fabrication jobs. APPLIED MATERIALS ENDURA reactor delivers exceptional process control and repeatability by using its advanced control systems, including a touch-screen display, which can be operated by hand or with foot pedal control. This allows operators to adjust parameters such as substrate temperature, RF power, plasma parameters and gas flow to obtain the best process performance. This well-designed reactor chamber has a multi-chamber architecture that allows it to handle multiple process challenges at once. Its gas tight construction ensures stable, long-lasting operation in the presence of multiple reactive gas species. The use of robust mechanical seals around the chamber walls ensures vacuum integrity is retained during operation. The reactor can be equipped with a wide range of gases, such as oxygen, chlorine, fluorine, argon and nitrogen, which can be used for deposition, etching and cleaning operations. Its advanced gas delivery system ensures precise, repeatable delivery of these reactant gases. ENDURA reactor can also be fitted with a wide range of specialties such as automatic chamber cleaning, temperature control and a chamber-temperature abuse system. This allows the reactor to operate over a wide temperature range without compromising process performance. The reactor is designed to be highly modular and customizable, allowing the user to add components such as extra power sources and plasma sources. This enables it to be used for a wide variety of applications, including deposition, etching, ion implantation and cleaning. AMAT / APPLIED MATERIALS ENDURA reactor is an ideal choice for a wide variety of semiconductor applications. It delivers excellent process uniformity and repeatability, as well as flexible, customizable operation. It is also highly reliable, providing a long, maintenance-free operating life.
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