Used FSI / TEL / TOKYO ELECTRON Mercury #9116685 for sale

FSI / TEL / TOKYO ELECTRON Mercury is an advanced photoresist equipment developed by FSI Corporation. It is designed to handle the fabrication of large, highly complex integrated circuits with the highest speed and accuracy. The system combines advanced lithography, deposition, etch, and metrology processes, paired with a wide range of substrates and coating materials. This makes it an ideal tool for the production of high-density semiconductors used in today's most technologically advanced devices. FSI Mercury combines a flexible tool platform that adapts to changing circuit designs, provide scalability and predictability of performance. It features an advanced, multi-functional lithography unit that precisely processes patterns from the moment the images are inputted to the machine. The tool is designed to produce feature sizes of 0.25 micron or less with an accuracy of +/- 3nm. This increased accuracy allows for the production of smoother, smaller features. The deposition part of the process in TEL Mercury provides a wide range of materials, including metals like aluminum, copper, cobalt, titania, and diamond-like carbon (DLC). It also includes conformal deposition systems that enable the deposition of highly uniform and conformal thin films with no uniformity corrections required. This provides a higher level of accuracy when creating 3D structures. The etch process uses inductively coupled plasma (ICP) technologies to create high selectivity and conformality. This allows the production of a wide range of features and structures with minimal distortion. It also supports advanced timing technologies that provide tight control over the process, allowing reliable production. Finally, the metrology process in Mercury allows for precise measurement of both parts and films. It includes a high-resolution scanning electron microscope (SEM), near-field scanning optical microscope (NSOM), atomic force microscope (AFM), and a variety of other tools. All of these are designed to provide precise feedback on the features and performance of the devices. In conclusion, TOKYO ELECTRON Mercury is an advanced photoresist asset that provides high performance, scalability, and predictability. It combines a wide range of advanced lithography, deposition, etch, and metrology processes, along with a high degree of programmability, to provide engineers with a powerful tool for producing complex integrated circuits.