Used ANATECH / TECHNICS HUMMER 8.1 #9063447 for sale

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ANATECH / TECHNICS HUMMER 8.1
Sold
ID: 9063447
Wafer Size: 4"
Vintage: 1996
Chrome deposition system, 4" Installed in a cleanroom 1996 vintage.
ANATECH HUMMER 8.1 sputtering equipment is designed for coating deposition and sample sputter preparation applications. This state-of-the-art system features an automated in situ metrology unit, allowing for precise sputter control and concurrent analysis. TECHNICS HUMMER 8.1 is a high-vacuum, multi-source sputtering machine with a load-lock chamber, capable of a low pressure of 4 x 10-7 Pascal and a high degree of sputter uniformity over large substrate area. The primary component of ANATECH / TECHNICS HUMMER 8.1 is the sputter source. This is a high-current, rotatable plasma source that is capable of depositing a variety of metals and alloys. The sputter source features two distinct sections, allowing for precise control over sputter duty cycle, gas flow and pressure, and temperature. The unique design allows for independent sputter control of each section. This sputter source is equipped with the Plasma View III panel which provides accurate and reliable plasma monitoring data. The automation tool of ANATECH HUMMER 8.1 is driven by a distributed computer asset in the controller module, providing a comprehensive yet flexible platform for controlling all the functions of the sputter model. The automation equipment includes a control panel with easy to use analog control and digital readouts. It also features a Load Lock System which enables quick loading of substrates into the chamber and accurate sputter deposition. Furthermore, TECHNICS HUMMER 8.1 features a unique in-situ metrology unit which allows for precise sputter control and concurrent analysis. This machine is already equipped with a variety of analysis tools, including residual gas analyzer, Auger electron spectroscopy, and Ar-ion milling. Two optical ports are also included, further allowing for monitoring of the substrate during sputter processes. ANATECH / TECHNICS HUMMER 8.1 is designed with safety in mind. It is equipped with emergency shut down systems and a water-cooled magnet for extra precaution. In addition, this sputtering tool is designed to operate with reliable performance and low maintenance costs in an ultra-high vacuum environment. In conclusion, ANATECH HUMMER 8.1 is an advanced sputtering asset capable of providing precise and reliable sputter deposition for a variety of metals and alloys. It features a highly flexible automation model, an in-situ metrology equipment and safety shut down systems. Its advanced design allows for precise sputter control, analysis, and uniform deposition over larger substrates.
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