Used LEYBOLD / BALZERS Z 650 #9026903 for sale

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ID: 9026903
Sputtering system, currently installed.
LEYBOLD / BALZERS Z 650 sputtering equipment uses radio frequency (RF) energy to deposit thin films onto a wide variety of substrates. This system is designed for high-quality sputtering of metals, composites, and alloys and is equipped with a six-source ion source and a balanced RF generator. LEYBOLD Z 650 can reach high deposition rates of up to 2 nm/s with excellent repeatability and excellent roughness on the surface of the deposited film. BALZERS Z 650 is equipped with an ultra-low energy electron source for a uniform deposition of thin films with excellent film properties. The uniformity of film deposition is achieved thanks to the low electron energy, allowing ions to be extracted from the plasma and transferred to the substrate with very little deposition loss. In addition, the electron source can provide a very low substrate bias, resulting in highly uniform thin films with lower absorption of contaminants, better adhesion, and longer shelf life. Z 650 unit is automated to provide repeatable and reproducible deposition of thin films. The process parameters such as pressure, temperature, power, and duration are automatically controlled, which helps in achieving better repeatability and reproducibility of the deposited films and ensures continuous operation of the sputtering machine. LEYBOLD / BALZERS Z 650 tool has abundant protection features such as an automated emergency stop, a vibration monitoring asset, and automatic shut-down in the event of pressure variations. These features not only make the model more user-friendly but also assure better safety and performance of the equipment. Finally, LEYBOLD Z 650 is equipped with a variety of monitoring devices, such as a video camera, quartz crystal monitor, and mass spectrometer. These features enable continuous monitoring of the deposition process, providing detailed information about the thickness distribution, topography, and uniformity of the deposited film.
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