used LEYBOLD HERAEUS Z550 for sale

ID#: 131001 Manufacturer: LEYBOLD HERAEUS Model: Z550 Category: SPUTTERING SYSTEMS Equipment Details: Semi-automatic cathode sputtering system Includes: (Qty 2) PK150 magnetron sputtering cathodes: 6" diameter Cathodes for DC and RF DRESSLER Caesar 2.5 kW RF sputtering power supply DRESSLER VM 3000 automatic matching unit GS30 / 800 ADL DC sputtering power supply, 3 kW Substrate table with water cooling and RF-bias / RF-etching Gas inlet system with mass flow controller Second gas inlet is prepared LEYBOLD D-60A prevacuum pump LEYBOLD Turbovac 450 turbomolecular pump with LN2-baffle.
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