Used ULVAC IBS-6000 #9053705 for sale

ULVAC IBS-6000
Manufacturer
ULVAC
Model
IBS-6000
ID: 9053705
Vintage: 2004
Sputtering system, 2004 vintage.
ULVAC IBS-6000 is a sophisticated sputtering equipment designed for thin film deposition. The system utilizes radio frequency (RF) or direct current (DC) power sources to generate an ionized gas with high-energy particles. In the process of sputtering, this gas is directed onto a target material inside the deposition chamber. As the ions from the gas bombard the target material, the material is cut into thin films and deposited onto the substrate. IBS-6000 features a compact design, occupying a small footprint, and high-performance operation. The unit uses a high-purity, low-pressure process chamber that is easily configurable, allowing samples of different sizes and shapes to be processed. An advanced data measurement machine rapidly records the substrate temperature, pressure and ion current to ensure a precise deposition process. ULVAC IBS-6000 is designed to offer precise sputtering technology. It has an automated process setting with easy-to-use software and a newly developed shutter mechanism to ensure a consistent film thickness. The tool also features high-power ion sources and direct current modes that promote high-efficiency film deposition. The asset also features a gravity-shielded magnetron mechanism for uniform sputter deposition and a specially developed drive unit for precise sputter rate control. Additionally, IBS-6000 features a sophisticated in-situ film thickness monitor to ensure film thickness accuracy. This monitoring model includes a continuous film thickness measurement technique that can be used to detect the variation in sputtered film thickness in real time. ULVAC IBS-6000 is a versatile, high-performance sputtering equipment designed for producing thin films that are uniform and consistent in thickness. Its combination of precise applications and sophisticated systems makes it an attractive choice for a wide variety of deposition projects.
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