Used ASM WS 896 #9060206 for sale

ASM WS 896 is a high-end wafer stepper which is designed for manufacturers of both low- and high-volume production of semiconductor wafers. ASM WS896 is capable of stepping wafers up to eight inches in diameter and can accomodate up to six hundred wafers in a single process cycle. It features state-of-the-art optical and motor technologies, allowing the highest exposure accuracy of any stepper in its class. WS 896 is equipped with two high-precision galvanometer based scanning stages, controlled by a dedicated multi-processor equipment. This provides a parallel processing of scanning operations across the entire wafer, allowing for consistent results at maximum wafer throughput speeds. The galvanometers are designed to provide high-precision scanning performance and stability, while the multi-processor system boosts the unit responsiveness and accuracy. The stepper is also equipped with an innovative auto-focusing mechanism, allowing for precise alignments between the wafer and the optics. Its low magnification optics also help to maintain high accuracy, even when the wafer contains features of different thicknesses. The stepper also comes with an integrated air-bearing stage machine, which ensures fast and accurate step-and-repeat performance, with minimal drift. In addition to its optics and motors, WS896 also features an advanced motion control tool, allowing precise control over the motion of the optics and scanning stages. Its ultra-low latency and minimum ripple characteristics make it ideal for high-speed operation. Finally, the stepper is equipped with automatic tracking and correction capabilities, which ensure the utmost in precision and repeatability. Overall, ASM WS 896 is the ideal wafer stepper for high-volume production of semiconductor wafers. Its high-precision optics, motors, and motion control systems make it the perfect choice for achieving accurate and repeatable results, at high speeds and throughputs.