Used ASM WS 896 #9176106 for sale

ASM WS 896 is an optical stepper allowing for precise positioning of wafers for the purpose of lithography. It features a scanning area of 290mm with high stitching accuracy and speed for the highest degree of uniformity, as well as a built-in vision system and automatic wafer loading/unloading. This makes it well suited for the development of semiconductor manufacturing processes. Using direct-drive motorized linear axis systems and a stabilized illumination unit, ASM WS896 is able to maintain superior accuracy and stability when operating at its maximum scan speed of 10,000mm/second. Its vibration resistant design features superior positioning repeatability of ±3µm, making it ideal for shallow trench isolation and double-patterning processes. WS 896 features a built-in vision system and automatic wafer loading/unloading to ensure greater throughput. Automatic pattern recognition on the stage supports flexible alignment for both single and double patterning operations. The motorized zoom lens enables magnification adjustment from 6x to 60x for optimal resolution and focus. In addition, WS896 supports various exposure tools, from general UV to DUV. With its numerous exposure options and high flexibility, applications include lithography and etching for large formats, as well as simple masks and alignment layers. ASM WS 896 scans a range of wafer sizes ranging from 4 inches to 12 inches in diameter, and can support up to 8 layers of wafers within a single system. Finally, its exceptionally low failure rate makes it well-suited for reliable long-term operation.