Used ASML 300 #9047521 for sale
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ID: 9047521
DUV Stepper, 6"
Lens under N2 purge
Front end
Options:
SECS
REFL Image sensor
Arms
Pep 1 / Pep 2: Productivity upgrade
Reticle error compensation
Flatness model
LSQ Disto model
Mark sensor
Batch streaming
(2) Intensities
Focus monitoring
Aerial
IRIS
Flexible signal tower
Extended NA range
Focal adjustment
Extended exposure
TIS
Athena
Fast TTL alignment
Automated DOE exchanger
Phase modulator FTTL
Phase modulator OA
Alignment reports
Annular illumination
Athena allow high orders
Scribelane marks
(3) Library configurations
Visual alignment camera
1998 vintage.
ASML 300 is a wafer stepper used in the fabrication of semiconductor products. It is a photolithography tool that enables precise control over the patterns that are used to create transistors and other components on the chip. 300 is a dual-stage column scanner, which means the wafer moves in the x and y axes during exposure. The stage is driven by a high-speed DC motor that can control the stages with nanometer-level accuracy and repeatability. The scanner also contains several optical elements, such as optics, lenses, and a beam splitter, which are used to shape and shape the light for projection onto the wafer. The equipment is highly integrated and flexible, allowing for the manipulation and control of the light and substrate. ASML 300 is a rapidly advancing system, featuring the latest in exposure technology. It incorporates advanced features such as a motion controller, motor drive, microsecond pulse generators, and an intelligent vision unit that analyzes exposures with self-calibrating technology. The machine also utilizes a variety of detectors to ensure accuracy, including a line edge detection tool, a microscope for area inspection, and an in-line visual inspection asset for detailed surface evaluation. 300 has set the industry standard for accuracy and repeatability in the field of photolithography. With its dual-stage scanning mechanism, nanometer-level accuracy, and automated self-calibrating model, this wafer stepper is a reliable and efficient way to produce high-performance transistors and other components for the latest in microchips. It is the perfect choice for modern semiconductor fabrication.
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