Used ASML AT 1150iS Twinscan #9197839 for sale

ASML AT 1150iS Twinscan is a wafer stepper that offers comprehensive lithography processing for various single and multi-die applications. It is designed to meet the most demanding requirements of the semiconductor fabrication industry, offering the highest precision and accuracy, while minimizing total cost of ownership. The stepper features a two-mirror optical path, enabling a maximum resolution of up to 12 micrometers. This helps ensure repeatable process results and consistent yields, with improved throughput of up to 180 wafers per hour. The AT 1150iS is designed for high-end lithography requirements with exposure levels below 12 nano-joules per second. In addition, it has an extended field size of up to 52 by 80 millimeters, allowing for a wide range of wafer sizes to be processed. The AT 1150iS is equipped with an integrated stage and stepper motion controller offering excellent accuracy and precision over a wide range of working conditions. Embedded control software can be tailored to the needs of the application, providing flexible and adaptive operation. The stepper also offers an integrated system of vacuum pumps and sensors to ensure the right environment for accurate and repeatable processing. In addition, AT 1150iS Twinscan features ASML patented RealScan™ technology, awarded "best of spectrum" in recognition of its superior results. It employs active beam correction and beam centering capabilities that are essential for superior resolution and repeatable results. To ensure maximum uptime, ASML AT 1150iS Twinscan offers a range of advanced features designed to detect and address anomalies before they affect production. Attention to detail is shown with an embedded particle monitor for immediate fault detection, as well as HealScan monitoring to ensure the accuracy of the alignment. Overall, AT 1150iS Twinscan is an ideal solution for demanding lithography applications, offering the speed and accuracy to maximize efficiency and yield. With its flexible features and powerful operation, users of ASML AT 1150iS Twinscan can be confident of achieving superior process performance and results.