Used ASML AT-850 #9198430 for sale

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ASML AT-850
Sold
Manufacturer
ASML
Model
AT-850
ID: 9198430
Vintage: 2004
ARF Scanner Currently warehoused 2004 vintage.
ASML AT-850 wafer stepper is an automated, computer-controlled wafer processing machine used in the semiconductor fabrication process. It works by scanning a photomask with an ultraviolet laser and then transferring the pattern onto a wafer. The device is equipped with two different exposure sources and a full-field dithering scanning strategy for high-resolution patterning. This allows precise shape, line width, and distance control as well as achieving high throughput. The equipment is set up with two lithography sources - i-Line and ArF excimer lasers - that can be used to pattern features at 135 and 193 nm, respectively. Both lasers are wavelength and coherency controlled, meaning they can accurately pattern complex shapes with high resolution. The system also has multiple algorithms that can be used depending on the requirements of the job, optimizing throughput and process window. The wafers are transported to the mask aligner through a robotic handling unit and SCARA robots, both of which are highly precise and programmable. The stage can be programmed to handle a range of wafers, with sizes ranging from 200 up to 400 millimeters. Once the wafer is in place, it can be precision-pitched and tilted onto the mask, which has a field-of-view that can be adjusted to match the job requirements. The wafer stepper is also equipped with a variety of detectors that are used to monitor and control the exposure process. This includes interferometers, detectors for measuring the profile of a patterned wafer, and scanning electron microscopes that can scan the entire wafer at high magnification. This ensures that the patterns are of the highest quality and fidelity. Any parameters that need to be changed during the lithographic process can be adjusted accurately and quickly with the on-board controller, which is an industrial-grade Automation PC. This allows users to easily program or modify exposure settings and exposure times. Finally, ASML AT 850 wafer stepper is also highly energy efficient, reducing the environmental impact of the process. Some models also have an energy recovery machine built in, which helps reclaim energy that is otherwise lost during the exposure process.
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