Used ASML AT-850D #9197016 for sale

ASML AT-850D wafer stepper is a highly precise and accurate optical alignment equipment utilized in the fabrication process of integrated semiconductor circuits. It is equipped with a 5 axis simultaneous positioning system capable of nanometer precision alignment. It has a dimensions of length: 19.7 foot (6m), width: 9.3 foot (2.8m), and height: 9.7 foot (3m). ASML AT850D is a highly advanced unit that offers superior feature for wafer alignment. It has a highly sensitive linear encoder machine along with a precise encoder scale accuracy of ±1nm, which ensures excellent accuracy and repeatability. The advancements allow for a millisecond stage motion. The turnkey control tool of the machine allows for total prevention of deformation from external vibration. AT 850D is designed with an automated inspection asset that can detect, analyze and maintain accurate wafer alignment. It has a total 6-head alignment model, each capable of detecting up to 25 markers on a given wafer. The equipment is controlled by a powerful process control system which is composed of several servo and motion control modules, and advanced software. The wafer stepper can accommodate a wide range of alignment steps and includes an intelligent wafer indexing unit which allows for multiple wafer alignments per exposure. The full featured machine processes almost any alignment pattern with a high degree of precision. It uses sophisticated computational and image processing algorithms along with advanced optics to ensure accurate wafer positioning. The machine is also equipped with an advanced high-precision wafer alignment microscope. This microscope offers customers a superior view of the wafer bonding area. It can offer up to 8μm accuracy over a 5 micrometer error range and can resolve 1 nanometer size features. The tool is designed with a highly optimized optical asset that provides low distortion optics. Moreover, the special illumination model produces a uniform, high-intensity light source which eliminates hot spots and reduces circuit distortion. Overall, ASML AT 850D wafer stepper is a highly precise and accurate equipment with a wide range of features designed to provide superior accuracy in wafer fabrication. It is equipped with the latest technology to ensure maximum accuracy and repeatability for the perfect alignment of wafers during the fabrication process.