Used ASML PAS 2500 / 30 #9190605 for sale

ASML PAS 2500 / 30 is a wafer stepper used in the production of semiconductor devices. It is a state-of-the-art equipment combining optics, mechanics and control technology to produce high resolution and highly accurate exposure images. The advanced capabilities of this stepper make it suitable for a wide variety of applications and production requirements. The system uses a low magnification, long working distance lens in order to reduce focus shift in the near infrared region. This enables the production of short exposures, ranging from 30 to 120ms, and increased throughput. The X/Y stages use precision servo based motion control, with advanced algorithms, to provide top precision motion control in a tight package. The unit uses step and repeat technology to achieve high throughput by quickly writing images onto wafers. The stepper has field sequential illumination (FSI) and also supports uniform, equal flux illumination (EFI) for controlling exposure dose and improving accuracy and uniformity of image resolution. The stepper also has programmable exposure systems to optimize exposure energy and reduce the effects of focus and thermal drift during the exposure. The machine has an accurate and fast automatic calibration tool that can adjust for alignment and focus deviation which results in increased throughput and reduced downtime. It also includes systems for profile and anomaly detection which enable better control of light intensity for exposure dose accuracy. Additionally, the asset uses defect inspection and review systems to check the quality of exposed images. PAS 2500 / 30 is an advanced model which makes it suitable for production of semiconductor devices with the highest level of accuracy and precision. It has excellent features such as precise motion control, field sequential illumination, exposure dose accuracy systems, image reviewing systems and defect detection. This makes it a reliable and efficient tool for the production of high quality semiconductor devices.