Used ASML PAS 5500 / 100D #9203101 for sale

ASML PAS 5500 / 100D is a world-leading wafer stepper developed by ASML, an advanced semiconductor manufacturing company. It is a compact, air-bearing, precision positioning equipment for accurately transferring patterns onto a circular plate called a wafer. ASML PAS 5500/100D is composed of three main components: a main structure, a lambda-axis, and a pattern generator. The main structure consists of an X-Y stage driven by precision motors to achieve nanometer-level stabilities in all three axes of motion. The lambda-axis is a rotary stage that is capable of rotating the wafer and adopting an array of different formats such as round, rectangular, and square depending on the application. The pattern generator includes high-performance laser components which generate the pattern on the wafer when exposed to the transmitted laser light. The pattern generator also includes an advanced optics system to provide the desired resolution down to 300nm. PAS 5500 / 100 D also features a robust closed-loop motion control unit for high-precision alignment and positioning. This control machine utilizes encoders, a feedback tool, and various interfacing elements such as a vision/image processing asset and laser interferometry for accurate wafer transport. The design of the machine also utilizes an air-bearing model to minimize vibration and ensure a stable platform. ASML PAS 5500 / 100 D is also equipped with an advanced environment control equipment. This system allows for precision temperature and humidity control to maintain the wafer parameters and avoid any damages caused by heat or humidity. The entire unit is enclosed in a dust-proof container to ensure a dust-free environment. Finally, PAS 5500/100D also features a user-friendly interface for easy operation. This includes an interactive graphical user interface (GUI) which allows users to customize the settings and parameters to suit their particular application. The machine also has diagnostic software which can be used to analyze machine operations and detect any errors or faults. In conclusion, PAS 5500 / 100D is a reliable and precision wafer stepper designed to meet the toughest requirements of today's semiconductor manufacturing industry. It offers efficient and accurate patterning of wafers with high throughput and a wide range of features including a robust motion control machine, advanced optics tool, precise environment control asset, and user-friendly interface.