Used ASML PAS 5500 #9196425 for sale

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ASML PAS 5500
Sold
Manufacturer
ASML
Model
PAS 5500
ID: 9196425
Steppers.
ASML PAS 5500 is a wafer stepper designed to support advanced layers, reticles, and masks in photolithography processes. This machine is capable of performing repairs and corrections on functional layers, resulting in significant improvements in wafer performance. Meant to be used in a range of applications, PAS 5500 features a maximum resolution of 4 nm, with a maximum scanning area of 463 mm x 513mm. It also features reduced vibration levels and enhanced repeatability of exposures, meaning that layers can be uniformly exposed across multiple wafers. ASML PAS 5500 is also capable of precision alignment, with a repeatability of 1 nm. The machine's design also focuses on safety by featuring several safety features, such as its air lock chamber, laser interlock, and safety doors. This ensures minimum contact by technicians and operators during operation. Its programmable PAS 5500 Control System is designed to minimize set-up times, control exposure levels, and reduce errors, giving users a consistent performance. ASML PAS 5500 is also equipped with powerful cooling functions, efficient material transport, excellent beam profile, and a fast close-down system to maximize operation performance. This optimized operation also yields excellent pattern fidelity for customers. It is capable of utilizing a variety of light sources, and its maximum wafer temperature results in reduced distortion. To ensure its longevity, PAS 5500 is outfitted with a robust mechanical frame and metal-laser welded covers for enhanced reliability. With a power requirement of 7.5 kW, ASML PAS 5500 is designed to support large multiple wafer exposures without sacrificing performance. Overall, PAS 5500 is a reliable and powerful wafer stepper designed for precision lithography. It is designed to maximize accuracy, reduce cycle times, and deliver improved results compared to other conventional systems.
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