Used ASML Twinscan AT 1100 #9193540 for sale

ASML Twinscan AT 1100 is a high-precision wafer stepper, manufactured by ASML, that is designed to support the manufacture of complex, high-resolution integrated circuit chips. The AT1100 is a highly-configurable and scalable stepper, capable of supporting substrates ranging from 50 mm to 200 mm in diameter. The AT1100 features a compact, user-friendly design and is equipped with a wide range of advanced opto-mechanical components and features, which make it ideal for high-volume fabrication operations. It is equipped with a 5-axis scanning stage for precise substrate positioning, a reticle measurement equipment, a high-resolution camera, and an advanced illumination system. The AT1100 is designed with a high degree of automation and ergonomic features. The unit is compatible with a full range of wafer handlers and multiple wafer sizes, as well as a range of high pressure and low pressure processing modules. It is capable of providing superior optical performance, with a measured resolution capability of 5 nm. Moreover, the AT1100 features an advanced DUV scanner, with a wavelength range of 248 nm and 193 nm. It is also equipped with an advanced F2 optics machine, and a high speed, high precision 4-axis stage with a repeatability of 0.36 μm. The extensive software suite gives users full control over the scanning process, optimising the entire operation. The AT1100 wafer stepper is highly versatile and capable of providing high-precision imaging and exceptional throughput. It is easy to use and well-suited for industrial applications where high quality components and fast cycle times are essential. The tool's advanced features and optimal performance make it one of the most reliable and cost-effective wafer steppers currently available on the market.