Used ASML XT 1250 #9191912 for sale
It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.
Sold
ID: 9191912
Wafer Size: 8"
Stepper, 8"
Wafer type: Notch
Laser model: GIGAPHOTON GT42A4 (20W)
Laser type: GIGAPHOTON Laser
FAT Attendance
OIU / Reticle wafer aux port: Left configuration
CSR's for XT1250B various: CSR 7603
FOUP Machine door sensor: No
PPD IRIS (CSR): No
CSR (AT Multilingual UI): No
Pellicle safeguard (CSR): No
CSR (LS M2M P2P): No
Active contrast control: No
Quasar: No
WH Carrier interface: (25) Wafers open cassette kit
Wafer track interface: SOKUDO RF3/200
Mark sensor
Integrated reticle library: No
IRIS-6 Inch reticles twinscan: No
DOE ID12 Low sigma
DOE MP2 35-X: No
DOE MP2 35-Y: No
DOE ID5 MP4 30-45: No
DOE ID2 MP4 20-45: No
Reticle CIDRW (Tag reader): No
FOUP Lockout system: No
DOE ID6 High sigma
Chuck dependent correction (CSR): No
Image streaming: Standard
Second laser paddle: No
CD-FEC: Standard
Lithoguide ILIAS: Standard
Wafer ID reader: No
MDL View: Site view
Athena narrow marks: Standard
Reticle barcode reader
Focus spot monitor: Standard
Reorder lot service: No
UNIVERSAL Prealignment: No
Recipe creator
Quasar XL: Standard
Automated reticle transport: No
Lot overhead reduction: LOR-2 / Standard
Machine specification for SWkey: B
Quasar XL: Standard
Dose mapper: Standard
Top package: Standard on XT:1400 (Top 2)
PEP for AT 1200B: No PEP package
DOE ID28 MP5 Soft quasar: No
DOE ID18 MP2 40-Y: No
DOE ID19 MP2 40-X: No
DOE ID31 MP4 40-45: No
DOE ID14 MP4 60-45: No
DOE ID21 MP4 45: No
EFESE: No
CSR L1L7 Type_1: No
ASF LS area extension: No
DOE ID9 MP4 20: No
IRIS Feature scan: No
Reticle shape correction
Twinscan wafer switch
DOE ID8 MP2 90-X: No
DOE ID7 MP2 90-Y: No
DOE ID13 MP4 30: No
PupMeas with ILIAS: No
CSR Proximity matching: No
ExpoSure: No
NA Extension / Diaphragm limiter: No
DOE ID29 MP2 60-X: No
DOE ID30 MP2 60-Y: No
Chemical sampling ports: No
ASF (LS Spot Coverage): No
System perf indicators focus: No
Equipment constants: No
BAM (Bandwidth analysis module): No
DOE ID20 Ultra low sigma: No
2D Barcode reader: No
ASF (E-chuck Flatness Qualification): No
Wait watcher: No
Reticle streaming: No
Best uniformity settings (BUSS): No
Grid mapper
Chuck dedication: No
Spot less: No
Module name Last value Status Unit Limit
Total shot 15825.9 - Mpulse -
Chamber 4344.8 36% Mpulse 12000
L/N Module 4345.9 31% Mpulse 14000
Fronut mirror 2260.7 16% Mpulse 14000
Monitor module 7443.7 74% Mpulse 10000
HG Lamp 6113 3% Cycle 200000
F2 Trap (C) 96.62 97% Cycle 100
F2 Trap (T) 5789.8 33% Hour 17520
Excimer shutter 356890 12% Cycle 3000000
Power: 400 V.
ASML XT 1250 is a wafer stepper used in the semiconductor industry for photolithography. ASML XT1250 features a number of advanced technologies designed to manufacture extremely precise patterns on the surface of circular wafers. XT 1250 uses "twin-field optics," which allows for extremely precise alignment between masks and wafers during the printing process. This technology provides features with sub-micron resolution on wafers. It also features a unique multi-channel interferometer that provides extremely precise measurements of linear distances. XT1250 is powered by an apexengine, the world's fastest multi-CPU platform. This allows large wafers to be printed quickly and with high resolution. It can also be configured to handle different applications, from smaller wafers to larger devices. The apexengine allows for faster production cycles, higher throughput and better uniformity. ASML XT 1250 features a dynamic focus compensation system (DFCS), which helps maintain focusing accuracy during the printing process. The DFCS technology reduces the need for manual refocussing and guarantees stable pattern printing. The machine's Specifier/Revealer software allows for tailored patterning on wafers. This software can adjust field positions to create even, precise patterns and can also help to preserve data without losing resolution. ASML XT1250 also features a ProFlux solution which ensures an optimal flux supply to the wafer surface. This innovative approach increases the etch rate of the wafer without compromising the quality of the patterns. Additionally, the ProFlux configuration can support multiple wafers per job, saving manufacturers time and money. XT 1250 is an advanced wafer stepper, offering manufacturers advanced solutions and powerful performance. It provides unparalleled precision, accuracy and reliability for the printing of tiny features on wafers. The high throughput of the machine, combined with its advanced software solutions, make XT1250 an ideal solution for semiconductor manufacturers seeking to decrease design times while improving yields and throughput.
There are no reviews yet