Used CANON FPA 6000 ES6a #9193101 for sale

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CANON FPA 6000 ES6a
Sold
Manufacturer
CANON
Model
FPA 6000 ES6a
ID: 9193101
Vintage: 2007
Stepper 2007 vintage.
CANON FPA 6000 ES6a is a wafer stepper designed for device fabrication processes that require high accuracy, excellent alignment, and stable operation. It is an advanced tool that offers improved production throughput and minimal wafer loss. The performance of CANON FPA 6000ES6A is based on its superior optical equipment, a combination of a high NA projection lens, and a four-sensor wafer alignment system for very accurate overlay alignment. The high NA projection lens is of NA 0.75, providing a superior resolution of 1.5 µm; this and the four sensors aid in extremely precise and accurate alignment. The internal wafer handling module offers a higher level of precision, with an accuracy of up to ±2 µm to effectively achieve separated exposures on the wafer, in order to produce smaller components. Additionally, the stepper has a unique wafer chuck design which extracts the wafer fewer times than traditional wafer steppers, meaning fewer opportunities for particles contamination. FPA-6000ES6A offers outstanding processing speed and accuracy. It offers exposure speed up to 12 secs/layer across the entire wafer. In addition, its imaging uniformity is exceptional, allowing for highly reliable alignment of each chip on a wafer. A user-friendly DSC1000 unit is at the heart of FPA 6000 ES6a, enabling users to easily access all the features. This machine provides users with a comprehensive data set for each layer, allowing analysis of results against process profiles and running consistent optimizations. In addition, CANON FPA-6000ES6A has a number of user-friendly features such as autofocus and wafer jig recognition. These practical features minimizes setup time and the number of manual operations. Moreover, the automatic jig loader allows multiple wafer jigs to be placed on the wafer chuck without interruption, making sure that the wafers are ready for production in no time. Finally, CANON FPA 6000 ES 6 A is built for long-term reliability. It has a number of key safety components such as a wafer breakage detection tool and dust-detection sensor, to ensure reliable operation. FPA 6000 ES 6 A is an ideal choice for precision lithography in device fabrication processes. Its combination of features make it a trusted solution for commercial-level production and development.
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