Used ADE / KLA / TENCOR 575 #9132534 for sale

ADE / KLA / TENCOR 575 is a high-performance wafer testing and metrology equipment designed for inspection and control of semiconductor wafers. This system is capable of measuring the electrical, optical and physical characteristics of a semiconductor wafer up to 5.75 inches in diameter. ADE 575 unit includes an advanced optical inspection machine which uses a charge-coupled device (CCD) to scan the wafer surface. The CCD sensors provide an accurate inspection of both the top and bottom surfaces of the wafer, detecting shape and size as well as other features such as defects. The optical tool is also used to measure the reflectivity of the wafer and lateral pore sizes. KLA 575 asset includes an electrical test station which measures electrical characteristics such as resistance, current leakage, capacitance, and voltage breakdown. This test station also provides fast, automated sorting of good and bad die. An electrical probe station is integrated into the model, allowing for probing of individual die for current and resistance tests. 575 equipment also includes a metrology station which is used to measure critical dimensions such as gate lengths, trench depths and isolation distances. High accuracy laser interferometry is used to measure precise 3-D shapes. Additionally, TENCOR 575 system includes a unique "Study Set" feature which allows complex process studies to be conducted. This feature enables full characterization of a wafer lot with correlations to program code and exact analysis of systematic factors. This feature also supports data review and analysis through advanced data analysis capabilities. ADE / KLA / TENCOR 575 unit also provides a full package of software for control, test sequencing and data analysis. This software is designed for easy operation and integration with other in-line processes. The software also ensures that all data collected is automatically stored and readily available for review. Overall, ADE 575 is a high-performance wafer testing and metrology machine designed for advanced process control and monitoring. This tool allows for flexible and precise measurement of electrical, optical and physical characteristics of a semiconductor wafer. Additionally, data review and analysis are provided through advanced software and data analysis capabilities, ensuring efficient and reliable operation.