Used ADE / KLA / TENCOR 8100 #9187693 for sale
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ID: 9187693
Wafer Size: 4"-6"
Vintage: 1986
Microscan system, 4"-6"
2 in / 4 out
Alignment station
Flatness station
High res station
ASC Controller
Accessories included
Sender elevators:
One/two senders
Deliver wafers from cassettes to the main transport belt
Prealigner:
Centers wafers on vacuum chuck
Aligns them with reference to primary flat/notch
Determines locations of up to four secondary flats
Flatness station:
Measures operator-specified portion of wafer surface
Calculates minimum, maximum, centerpoint, and average thickness
(MINTHK, MAXTHK, CTRTHK, AVETHK)
Thickness variation (TTV)
Focal plane deviation (FPD)
Total Indicator reading (TIR)
Total Indicator reading at localized areas (SITE TIR)
Percent usable area based on thickness
(THICK PUA), FPD (FPD PUA) and SITE TIR (SITE TIR PUA) sem I conductor type
Resistivity station:
Measures resistivity at one user-programmed point on the wafer surface
Receiver elevators:
One - four receivers
Transport wafers
Main transport belts to cassettes
1986 vintage.
ADE / KLA / TENCOR 8100 is an advanced Solid-State Scanning Electron Microscope (SSEM) that is designed to provide users with significant imaging advantages in a variety of scientific and industrial applications. ADE 8100 features unique technologies, including a multi-pattern generator that uses focused electron beam probing to acquire multiple images with minimal sample drift and distortion, enabling accurate imaging with minimal artifacts. KLA 8100 is driven by an integrated control system, comprising a high-precision scanning microscope with an integrated digital signal processor and amplifier. This system allows for unparalleled imaging accuracy and scanning throughput. Additionally, precision motion stages and actuators enable TENCOR 8100 to achieve high resolutions in scanning operation. To improve imaging quality, 8100 is equipped with high frequency inputs that can reduce jitter and noise, and comprehensive auto-alignment capabilities to increase sample accuracy. For motion control, ADE / KLA / TENCOR 8100 features advanced fast-scanning motors and omnidirectional controls for smooth, precise scanning. Its imaging software is designed to provide high-standard imaging quality at any magnification. Additionally, ADE 8100 features an automated sample characterization suite to enable researchers to easily measure physical, electrical and other material properties. Its user-friendly interface enables researchers to work remotely and view sample data through internet browsers. KLA 8100 also boasts comprehensive analysis opportunities with functions such as 3D image reconstruction and detectivity analysis. In summary, TENCOR 8100 is a powerful SSEM designed to handle rigorous data analysis and imaging. Its integrated control systems, motion stages, imaging software and automated characterization suite make it ideal for a range of industrial and scientific applications.
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