Used ADE / KLA / TENCOR 9500 #9186108 for sale

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ADE / KLA / TENCOR 9500
Sold
ID: 9186108
Wafer measuring system Dual loader system.
ADE / KLA / TENCOR 9500 is a renowned wafer testing and metrology equipment, designed to provide accurate and reliable wafer characterization and metrology data. This system introduces comprehensive planar wafer measurements that are complemented by advanced surface metrology capabilities. The unit is composed of a main scanning unit and several additional units that are connected to it. The main unit is a scanning unit which includes a precision motorized stage that moves the wafer across the sensors, while a Z-stage modifies the electron beam machine's focus in response to the wafer's geometry. An optics unit enables the user to acquire images at various magnifications. The main scanning unit also has capacitive sensors that measure the wafer's planar surface. These sensors are highly sensitive and accurate. In addition, the tool has several other components that increase its capabilities. The ellipsometer measures different optical characteristics such as the refractive index or the extinction coefficient. An automated wafer mapping asset is used to scan wAFM (Atomic Force Microscopy) in order to get a detailed topographical overview of the surface. The in-built software of the model provides an intuitive and easy-to-use graphical user interface to access the equipment's software. The software offers powerful data processing functions to perform the parameters measurement and analysis. The software can generate various types of reports, from statistical data to graphical presentations. This system can be run from any PC, using Windows Operating Unit, thereby providing flexibility. ADE 9500 machine is extremely precise and versatile. Its construction choices ensure fast and easy measurements with accurate results. Its wide range of abilities and precision make it a great choice for any laboratory that requires advanced metrology. With this tool, operators can easily characterize any type of wafer surface with superior accuracy and precision.
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